公开(公告)号：KR101745045B1

公开(公告)日：2017-06-08

申请号：KR1020130121877

申请日：2013-10-14

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 구보데라마사토 ,  기쿠시마히로히토 ,  야마구치히로후미 ,  사사키요시아키 ,  유멩야우

IPC: H01L21/677 ,  B25J9/16

CPC classification number: G05B19/4189 ,  G05B2219/37608 ,  H01L21/67259 ,  H01L21/67748 ,  H01L21/67766 ,  H01L21/681

Abstract: 티칭조작의작업성이향상해서작업자간의편차를저감하고, 피처리체와간섭할위험을억제하는반송기구의위치결정방법을제공한다. 피처리체의주변부의하면을유지하는유지핀부를가지고, 또한선회및 상하이동가능하게이루어진탑재대에대하여접근및 이간이가능하게이루어져서선단에피처리체의유무를검출하는검출부를마련한픽부를가지는반송기구의위치결정방법에있어서, 검출부에의해유지핀부의상단에지를검출해서픽부의높이기준위치를결정하는높이결정공정과, 탑재대의반경방향과픽부의전진방향과의어긋남각도를구해서픽부의전진각도를수정하는전진각도결정공정과, 탑재대의반경방향과픽부의전진방향과의어긋남수평거리를구해서픽부의전진기점위치를수정하는전진기점위치결정공정과, 유지핀부의좌표로부터픽부의전진기준량을구하는전진량결정공정을가진다.

Abstract translation: 提高教学操作的加工性，以减少操作者的偏差，并提供抑制到待治疗的受试者和干扰的风险的转移机构的位置的方法。 它保持销部分，用于保存根据该对象的周边被加工，并且具有旋转的输送机构和垂直可移动地与yirueojyeoseo制成使该方法和离开相对于用于检测物体的存在或不存在设置有检测器支架，以在尖端被处理拾取部件 在定位方法中，在保持角度，将拾取单元移动向前求出偏差角的销部，以检测是否在顶部和高度确定确定所述截齿的基准位置的高度的步骤中，用一个径向和由所述检测器接部前进方向 校正提前角确定步骤中，安装台径向方向和所述拾取单元向前移动开始定位过程以固定变速获得向前的方向和保持销，以获得拾取单元的水平距离起始剔取部分向前位置从坐标部向前移动参考量 并且提前量确定步骤。

公开(公告)号：KR1020140048052A

公开(公告)日：2014-04-23

申请号：KR1020130121877

申请日：2013-10-14

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 구보데라마사토 ,  기쿠시마히로히토 ,  야마구치히로후미 ,  사사키요시아키 ,  유멩야우

IPC: H01L21/677 ,  B25J9/16

CPC classification number: G05B19/4189 ,  G05B2219/37608 ,  H01L21/67259 ,  H01L21/67748 ,  H01L21/67766 ,  H01L21/681 ,  H01L21/67265 ,  G05B2219/39527 ,  G05B2219/45031 ,  H01L21/67742

Abstract: The present invention provides a method for positioning a return device by which the workability of a teaching operation is improved, inter-operator deviation is reduced, and the risk of interference with an object to be processed is suppressed. The method for positioning a return device which has a maintaining pin portion maintaining a lower surface of a peripheral portion of the object to be processed and has a pick portion configured to be accessible to and separable from a mount configured to be pivotable and movable in an up-and-down direction and provided with a detection unit at a tip end to detect the presence and absence of the object to be processed, includes a height determining step in which a height reference position of the pick portion is determined through the detection of an upper end edge of the maintaining pin portion by the detection unit; an advance angle determining step in which the shift angle between the radial direction of the mount and the advance direction of the pick portion is determined and the advance angle of the pick portion is corrected; an advance starting point positioning step in which the shift horizontal distance between the radial direction of the mount and the advance direction of the pick portion is determined and the advance starting point position of the pick portion is corrected; and an advance amount determining step in which the advance reference amount of the pick portion is determined from the coordinates of the maintaining pin portion. [Reference numerals] (AA) Start; (BB) Height determining step; (CC) Advance angle determining step; (DD) Advance starting point positioning step; (EE) Advance amount determining step; (FF) End

Abstract translation: 本发明提供了一种用于定位返回装置的方法，通过该方法可以提高教学操作的可操作性，减少操作者之间的偏差，并且抑制与被处理对象的干扰的风险。 一种用于定位返回装置的方法，该返回装置具有维持销部分，该保持销部分保持待处理物体的周边部分的下表面，并且具有构造成能够接近并可与其分离的拾取部分，所述安装件被构造成可枢转和移动 上下方向，并且在尖端设置有检测单元，以检测待处理对象的存在和不存在，包括：高度确定步骤，其中通过检测所述拾取部分的高度参考位置来确定 由所述检测单元保持所述保持销部分的上端边缘; 提前角确定步骤，其中确定安装座的径向与拾取部的前进方向之间的移动角度，并且校正拾取部的提前角度; 提前起点定位步骤，其中确定安装座的径向与拾取部的前进方向之间的移动水平距离，并且校正拾取部的前进起点位置; 以及提前量确定步骤，其中根据保持销部分的坐标确定拾取部分的提前基准量。 （附图标记）（AA）开始; （BB）高度确定步骤; （CC）前进角确定步骤; （DD）提前起点定位步骤; （EE）预付金额确定步骤; （FF）结束