公开(公告)号：KR1020140037756A

公开(公告)日：2014-03-27

申请号：KR1020130107163

申请日：2013-09-06

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 혼다마사루 ,  이토마사노리

IPC: H01L21/20

CPC classification number: B32B43/006 ,  B32B38/1858 ,  B32B2309/10 ,  B32B2457/14 ,  H01L21/304 ,  H01L21/67092 ,  H01L21/76254 ,  Y10T156/11 ,  Y10T156/1967

Abstract: The present invention aims the efficiency of peeling processing as its purpose. A peeing device according to an embodiment includes a first maintaining part, a cutting part, a measurement part, and a position adjusting part. The first maintaining part maintains a first substrate among polymerizing substrates attached to the first substrate and a second substrate. The cutting part cuts an attachment part of the first and second substrates. The measurement part measures a distance from a set measurement reference position to a maintenance surface of the first maintaining part or a distance to an object placed between the reference position and the maintenance surface. The position adjusting part adjusts a cut part of the cutting part based on the measurement result and information about the thickness of the attachment substrate.

Abstract translation: 本发明的目的在于提供剥离处理的效率。 根据实施例的排尿装置包括第一保持部，切割部，测量部和位置调整部。 第一维持部件在连接到第一基板的聚合基板和第二基板之间保持第一基板。 切割部分切割第一和第二基底的附接部分。 测量部件测量从设定的测量参考位置到第一维护部件的维护表面的距离或者到放置在参考位置和维护表面之间的物体的距离。 位置调整部基于测定结果和关于安装基板的厚度的信息来调整切断部的切断部。

公开(公告)号：KR102007041B1

公开(公告)日：2019-08-02

申请号：KR1020130107163

申请日：2013-09-06

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 혼다마사루 ,  이토마사노리

IPC: H01L21/20