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公开(公告)号：KR1020140071900A
公开(公告)日：2014-06-12
申请号：KR1020130142084
申请日：2013-11-21
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/20
CPC classification number: B32B43/006 , B32B38/1858 , B32B2457/14 , H01L21/67092 , H01L21/67132 , H01L21/6838 , Y10T156/1168 , Y10T156/19
Abstract: An object of the present invention is to promote efficiency of a peeling process. A peeling apparatus according to an embodiment of the present invention includes a first holding unit, a second holding unit, and a peeling inducing unit. The first holding unit holds a first substrate of a superimposed substrate in which the first substrate and a second substrate are bonded. The second holding unit holds the second substrate of the superimposed substrate and moves the second substrate in a direction of separating the second substrate from a surface of the first substrate. The peeling inducing unit forms an area where the second substrate starts to be peeled off from the first substrate on a side surface of the superimposed substrate. The second holding unit includes a first suction moving unit and a second suction moving unit. The first suction moving unit absorbs and moves a circumferential edge portion of the second substrate corresponding to the area formed by the peeling inducing unit, and moves in a direction of separating the circumferential edge portion from the surface of the first substrate. The second suction moving unit absorbs and moves a region which is closer to a central portion of the second substrate than to the circumferential edge portion of the second substrate, and moves in a direction of separating the region from the surface of the first substrate.
Abstract translation: 本发明的目的是提高剥离过程的效率。 根据本发明的实施例的剥离装置包括第一保持单元，第二保持单元和剥离诱导单元。 第一保持单元保持第一基板和第二基板接合的叠加基板的第一基板。 第二保持单元保持重叠基板的第二基板，并且使第二基板沿着从第一基板的表面分离第二基板的方向移动。 剥离诱导单元形成第二基板在叠加基板的侧表面上开始从第一基板剥离的区域。 第二保持单元包括第一抽吸移动单元和第二抽吸移动单元。 第一抽吸移动单元吸收并移动与由剥离诱导单元形成的区域相对应的第二基板的周边边缘部分，并沿着从第一基板的表面分离圆周边缘部分的方向移动。 第二抽吸移动单元吸收并移动比第二基板的周缘部靠近第二基板的中央部的区域，并且沿着与第一基板的表面分离该区域的方向移动。
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公开(公告)号：KR101922262B1
公开(公告)日：2018-11-26
申请号：KR1020130142084
申请日：2013-11-21
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/20
CPC classification number: B32B43/006 , B32B38/1858 , B32B2457/14 , H01L21/67092 , H01L21/67132 , H01L21/6838 , Y10T156/1168 , Y10T156/19
Abstract: 본발명은박리처리의효율화를도모하는것을목적으로한다. 실시형태에따른박리장치는, 제1 유지부와, 제2 유지부와, 박리유인부를구비한다. 제1 유지부는, 제1 기판과제2 기판이접합된중합기판중 제1 기판을유지한다. 제2 유지부는, 중합기판중 제2 기판을유지하고, 제2 기판을제1 기판의판면으로부터분리하는방향으로이동시킨다. 박리유인부는, 제2 기판이제1 기판으로부터박리되는시초가되는부위를중합기판의측면에형성한다. 또, 제2 유지부는, 제1 흡착이동부와, 제2 흡착이동부를구비한다. 제1 흡착이동부는, 박리유인부에의해형성되는부위에대응하는제2 기판의둘레가장자리부를흡착하고, 그둘레가장자리부를제1 기판의판변으로부터분리하는방향으로이동시킨다. 제2 흡착이동부는, 제2 기판의둘레가장자리부보다제2 기판의중앙부근처의영역을흡착하고, 그영역을제1 기판의판면으로부터분리하는방향으로이동시킨다.
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公开(公告)号：KR101900113B1
公开(公告)日：2018-09-18
申请号：KR1020130142044
申请日：2013-11-21
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/20 , H01L21/304
CPC classification number: B32B43/006 , B32B38/1858 , B32B2457/14 , H01L21/67092 , H01L21/67132 , H01L21/6715 , Y10T156/1168 , Y10T156/1961
Abstract: 본발명은박리처리의효율화를도모하는것을목적으로한다. 실시형태에따른박리장치는, 제1 유지부와, 제2 유지부와, 박리유인부를구비한다. 제1 유지부는, 제1 기판과제2 기판이접합된중합기판중 제1 기판을유지한다. 제2 유지부는, 중합기판중 제2 기판을유지하고, 제2 기판을제1 기판의판면으로부터분리하는방향으로이동시킨다. 박리유인부는, 제2 기판이제1 기판으로부터박리되는시초가되는부위를중합기판의측면에형성한다. 또, 박리유인부는, 예리부재와, 중합기판의측면중, 제2 기판에서의제1 기판과제2 기판의접합부분근처의측면을향해서예리부재를이동시키는이동기구를구비한다.
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公开(公告)号：KR1020140071898A
公开(公告)日：2014-06-12
申请号：KR1020130142044
申请日：2013-11-21
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/20 , H01L21/304
CPC classification number: B32B43/006 , B32B38/1858 , B32B2457/14 , H01L21/67092 , H01L21/67132 , H01L21/6715 , Y10T156/1168 , Y10T156/1961
Abstract: The present invention is to promote efficiency of a peeling apparatus. The peeling apparatus according to an embodiment comprises a first holding unit, a second holding unit, and a peeling inducing unit. The first holding unit holds a first substrate of a polymerized substrate in which the first substrate and the second substrate are bonded. The second holding unit holds the second substrate of the polymerized substrate and moves the second substrate in a direction of separating the second substrate from a surface of the first substrate. The peeling inducing unit forms an area where the second substrate starts to be peeled off from the first substrate on a side surface of the polymerized substrate. The peeling inducing unit also comprises a sharpening member and a moving member for moving the sharpening member toward the side surface close to a joining portion of the second substrate and the first substrate on the second substrate of the polymerized substrate.
Abstract translation: 本发明是为了提高剥离装置的效率。 根据实施例的剥离装置包括第一保持单元，第二保持单元和剥离诱导单元。 第一保持单元保持第一基板和第二基板接合的聚合基板的第一基板。 第二保持单元保持聚合基板的第二基板，并使第二基板沿着从第一基板的表面分离第二基板的方向移动。 剥离诱导单元在聚合基板的侧面形成第二基板开始从第一基板剥离的区域。 剥离诱导单元还包括磨削构件和移动构件，用于使磨碎构件朝向接近第二基板的接合部分的侧表面移动，并且使聚合基板的第二基板上的第一基板移动。
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