公开(公告)号：KR1020010088400A

公开(公告)日：2001-09-26

申请号：KR1020010011383

申请日：2001-03-06

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 쿠가야스히로 ,  타노우에미츠히로 ,  타나카코우이치로우

IPC: H01L21/02

CPC classification number: H01L21/68728 ,  H01L21/67098

Abstract: PURPOSE: To suppress the deformation of a heat plate due to heat contraction of a supporting member. CONSTITUTION: A heat plate 65 in a post exposure baking device is supported by an annular supporting member 70 having a circular step 70a along the inner circumference thereof. The supporting member 70 is fixed on a support 74 with a plurality of bolts 71. The bolts 71 are provided on the inner circumferential surface of the step 70a facing the outer circumferential surface of the heat plate 65, in a manner that the circumferential surface on the side of the heat plate 65 of the bolts 71 may be exposed toward the side of the heat plate 65. In addition, a collar 76 is provided around the outer circumference of the bolt 71, and the heat plate 65 is fixed at a given position by the collar 76.

Abstract translation: 目的：抑制由于支撑构件的热收缩导致的加热板的变形。 构成：后曝光烘烤装置中的加热板65由具有圆形台阶70a的环形支撑构件70沿其内周支撑。 支撑构件70用多个螺栓71固定在支撑件74上。螺栓71设置在台阶70a的与加热板65的外周面对置的内周面上， 螺栓71的加热板65的一侧可以朝向加热板65的侧面露出。另外，在螺栓71的外周周围设置有轴环76，并且加热板65固定在给定的 衣领76的位置。