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公开(公告)号：KR1020120049803A
公开(公告)日：2012-05-17
申请号：KR1020110106852
申请日：2011-10-19
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/66 , G01N21/956 , H01L21/027
CPC classification number: H01L21/67288 , H01L21/67178 , H01L21/67276 , H01L21/67745 , H01L21/0274 , G01N2021/9563 , H01L22/30
Abstract: PURPOSE: A substrate processing apparatus, a program, a computer storage medium, and a substrate transfer method are provided to prevent mass production of inferior goods in wafer processing since a substrate is transferred by bypassing a specified processing unit having a defect. CONSTITUTION: A defect classification member(203) classifies a defect based on the test result of a defect test part. A memory member(202) memorizes a carrier route of a substrate by a substrate transfer apparatus when the substrate is processed by the processing unit. A specific defect process member(204) specifies the processing unit which causes the classified defect based on the memorized carrier route of the substrate and the kinds of the classified defect. The defect process specific member determines the abnormality of the specified processing unit.
Abstract translation: 目的：提供基板处理装置，程序，计算机存储介质和基板转印方法，以防止由于通过绕过具有缺陷的指定处理单元传送基板而在晶片处理中大量生产劣质商品。 构成：缺陷分类构件（203）基于缺陷测试部件的测试结果对缺陷进行分类。 当处理单元处理基板时，存储元件（202）通过基板传送装置存储基板的载体路径。 具体的缺陷处理部件（204）根据基板的存储载体路径和分类缺陷的种类，确定导致分类缺陷的处理部。 缺陷处理特定构件确定指定处理单元的异常。
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公开(公告)号：KR101670940B1
公开(公告)日：2016-10-31
申请号：KR1020110106852
申请日：2011-10-19
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/66 , G01N21/956 , H01L21/027
CPC classification number: H01L21/67288 , H01L21/67178 , H01L21/67276 , H01L21/67745
Abstract: 처리부의이상의유무를리얼타임으로판단하고, 또한불량품웨이퍼가다량으로생산되는것을방지한다. 도포현상처리장치는웨이퍼반송기구와, 결함검사부와, 웨이퍼의반송을제어하는반송제어수단(200)과, 결함의상태에기초하여상기결함의분류를행하는결함분류수단(203)과, 처리유닛에의해웨이퍼가처리될때의웨이퍼반송기구에의한웨이퍼의반송순로를기억하는기억수단(202)과, 결함분류수단(203)에의해분류된결함의종류와기억수단(202)에기억된기판의반송순로에기초하여, 상기분류된결함이발생한처리유닛을특정하는결함처리특정수단(204)과, 결함이발생했다고특정된처리부의이상의유무를판정하는결함처리특정수단을가지고, 반송제어수단(200)은, 결함처리특정수단(204)에의해이상으로판정된처리유닛을우회하여웨이퍼를반송하도록웨이퍼반송기구의제어를행한다.
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