마스크, 마스크 제조 방법 및 마스크 제조 장치
    1.
    发明授权
    마스크, 마스크 제조 방법 및 마스크 제조 장치 有权
    掩模,制造掩模的方法和制造掩模的装置

    公开(公告)号:KR101029999B1

    公开(公告)日:2011-04-20

    申请号:KR1020090125024

    申请日:2009-12-15

    CPC classification number: C23C14/042 B23K26/0846 H01L51/56

    Abstract: PURPOSE: A mask and a method of manufacturing mask and an apparatus thereof are provided to space convenience in connection process by forming a through hole in a base substrate. CONSTITUTION: A first mask member(110) comprises a first pattern portion(111), a first junction(112), and a first buffer(113). The first pattern portion comprises a plurality of slits(111a). A second mask member(120) comprises a second pattern portion(121), a second junction point(122), and a second buffer(123). The second pattern portion comprises a plurality of slits(121a). The first mask member and the second mask member are connected through a welding method.

    Abstract translation: 目的:提供掩模和掩模的制造方法及其装置,以便通过在基底基底中形成通孔来实现连接过程的便利。 构成:第一掩模构件(110)包括第一图案部分(111),第一结(112)和第一缓冲器(113)。 第一图案部分包括多个狭缝(111a)。 第二掩模构件(120)包括第二图案部分(121),第二接合点(122)和第二缓冲器(123)。 第二图形部分包括多个狭缝(121a)。 第一掩模构件和第二掩模构件通过焊接方法连接。

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