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公开(公告)号：KR1020120081419A
公开(公告)日：2012-07-19
申请号：KR1020110002753
申请日：2011-01-11
Applicant: 삼성전기주식회사
CPC classification number: G01B9/02044 , G01B9/0203 , G01B9/0209 , G01B9/02091 , G01B11/0675 , G01N21/45 , G01N21/8422 , G01N2021/8438
Abstract: PURPOSE: A device and a method for measuring a multi-layered thin film are provided to enhance the performance for measuring properties of a multi-layered thin film in non-destructive method by supplying interferential signals or reflection signals according to an opening/closing of an optical shutter. CONSTITUTION: A device(10) for measuring a multi-layered thin film comprises a light source(100), an interference-reflection unit(200), a sample unit(300), an interference-reflection light detecting unit(400), and a signal processing unit(600). The light source irradiates lights of a sample consisting of a multi-layered thin film. The interference-reflection unit generates interferential signals due to an overlap of reference reflected light reflected in a first beam and sample reflected lights reflected in a second beam when an optical shutter(230) is opened. The interference-reflection unit generates reflection signals due to sample reflected lights reflected in the second beam when the optical shutter is closed. The interference-reflection light detecting unit detects the intensity of the generated interferential signals and reflection signals by dispersing the lights per each wavelength. The signal processing unit controls opening/closing of the optical shutter and transferring of a support stand.
Abstract translation: 目的：提供一种用于测量多层薄膜的装置和方法，以通过提供干涉信号或反射信号来提高用于以非破坏性方法测量多层薄膜的性能的性能，所述干涉信号或反射信号根据 光学快门。 构成：用于测量多层薄膜的装置（10）包括光源（100），干涉反射单元（200），采样单元（300），干涉反射光检测单元（400） 和信号处理单元（600）。 光源照射由多层薄膜组成的样品的光。 当光闸（230）打开时，干涉反射单元由于在第一光束中反射的参考反射光和在第二光束中反射的采样反射光的重叠而产生干涉信号。 当光学快门关闭时，干涉反射单元产生由于在第二光束中反射的样品反射光引起的反射信号。 干涉反射光检测单元通过分散每个波长的光来检测产生的干涉信号和反射信号的强度。 信号处理单元控制光学快门的打开/关闭和支撑台的传送。
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公开(公告)号：KR1020080093321A
公开(公告)日：2008-10-21
申请号：KR1020070037122
申请日：2007-04-16
Applicant: 삼성전기주식회사
IPC: B23K26/067 , B23K26/38 , B23K26/00
Abstract: A laser beam machining apparatus is provided to collect first and second laser beams respectively, adjust focus positions of the laser beams, and cut a transparent substrate effectively by moving the first and second lens through lens moving devices. A laser beam machining apparatus comprises a light source, a first beam splitter, first and second lens(103a,103b), first and second lens moving devices(109a,109b), and a second beam splitter. The light source emits the laser beam. The first beam splitter splits the laser beam into first and second laser beams(L1,L2). The first and second lens collect the first and second laser beams respectively. The first and second lens moving devices move the first and second lens to each optical axial direction to adjust focus positions of the first and second laser beams to be placed at different regions of a processed object. The second beam splitter splits the first and second laser beams and projects the laser beams on the object.
Abstract translation: 提供激光束加工装置以分别收集第一和第二激光束，调节激光束的焦点位置，并通过透镜移动装置移动第一和第二透镜来有效地切割透明基底。 激光束加工装置包括光源，第一分束器，第一和第二透镜（103a，103b），第一和第二透镜移动装置（109a，109b）和第二分束器。 光源发射激光束。 第一分束器将激光束分成第一和第二激光束（L1，L2）。 第一和第二透镜分别收集第一和第二激光束。 第一和第二透镜移动装置将第一透镜和第二透镜移动到每个光轴方向，以调整待放置在被处理物体的不同区域的第一和第二激光束的焦点位置。 第二分束器分裂第一和第二激光束并将激光束投射在物体上。
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公开(公告)号：KR100790702B1
公开(公告)日：2008-01-02
申请号：KR1020060086787
申请日：2006-09-08
Applicant: 삼성전기주식회사
IPC: G02B21/00
CPC classification number: G02B21/0076 , G02B21/0024 , G02B21/0032 , G02B21/0044 , G02B21/008
Abstract: A confocal electroluminescent spectral-microscope is provided to obtain a high spatial resolving power for an electroluminescent device and to measure the structural information and photoluminescence and electroluminescence characteristics of the electroluminescent device at the same time. A confocal electroluminescent spectral-microscope is composed of a support unit(21) equipped with an object containing electroluminescent materials; a power supply(22) for supplying current for making the object mounted on the support unit electrically emit the light; a confocal lens(24a) disposed on the support unit to receive the light emitted from the object; a detecting unit(26b) arranged on the upper side of the confocal lens to detect energy distribution for the light emitted from the object; and a pin hole(27) disposed between the confocal lens and the detecting unit to pass an electroluminescence signal for a co-focus formed on a target surface of the object.
Abstract translation: 提供共焦电致发光光谱显微镜以获得电致发光器件的高空间分辨能力，并同时测量电致发光器件的结构信息和光致发光和电致发光特性。 共焦电致发光光谱显微镜由配备有包含电致发光材料的物体的支撑单元（21）组成; 用于提供用于使安装在所述支撑单元上的物体的电流的电源（22）电发光; 设置在所述支撑单元上以接收从所述物体发射的光的共焦透镜（24a） 布置在所述共焦透镜的上侧的检测单元（26b），以检测从所述物体发射的光的能量分布; 以及设置在所述共焦透镜和所述检测单元之间的针孔（27），以通过用于形成在所述物体的目标表面上的共焦点的电致发光信号。
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公开(公告)号：KR100905881B1
公开(公告)日：2009-07-03
申请号：KR1020070100361
申请日：2007-10-05
Applicant: 삼성전기주식회사
CPC classification number: G01B11/026 , G01S7/4814 , G01S7/4818 , G01S17/10
Abstract: 구조가 간단하고 사용상의 제약이 적은 TOF방식의 레이저 측량장치에 비교적 간단한 구성을 추가하여 정확한 근거리 측량이 가능한 레이저 측량장치가 제안된다. 본 발명에 따른 레이저 측량장치는 발광부 및 수광부를 포함하는데, 발광된 광 또는 수광되는 광의 광경로는 광경로 연장부를 통하여 연장된다.
광섬유, 광학거울, 프리즘-
公开(公告)号：KR100878425B1
公开(公告)日：2009-01-13
申请号：KR1020070044143
申请日：2007-05-07
Applicant: 삼성전기주식회사
Abstract: 본 발명은 표면 측정 장치에 관한 것으로서, 본 발명은 레이저빔을 출사하는 광원과, 상기 레이저빔을 일 방향에 주사하는 회전반사미러와, 상기 회전반사미러에 의해 주사된 레이저빔을 받아 측정대상물에 주사하는 제1 광학계와, 상기 주사된 레이저빔 중 상기 측정대상물에 의해 반사된 빔을 상기 회전반사미러에 제공하며, 상기 회전반사미러에 제공된 빔이 상기 회전반사미러에 의해 반사되어 일정한 빔 경로를 갖도록 구성된 제2 광학계 및 상기 제2 광학계로부터 제공되어 상기 회전반사미러에 의해 반사된 빔을 검출하기 위한 적어도 하나의 반사빔 검출부를 포함하는 표면 측정 장치를 제공한다.
본 발명에 따르면 대면적을 초고속으로 측정할 수 있으면서도 정밀도가 향상되며, 나아가, 3차원 형상의 측정이 가능한 표면 측정 장치를 제공할 수 있다.
표면 측정, 표면 검사, 빔 주사, 빔 스캔, 회전반사미러, 갈바노 미러, 폴리곤 미러-
Patent Agency Ranking
公开(公告)号：KR100862449B1
公开(公告)日：2008-10-08
申请号：KR1020070037119
申请日：2007-04-16
Applicant: 삼성전기주식회사
IPC: G02B27/10
CPC classification number: G02B27/106 , G02B17/006 , G02B27/0905 , G02B27/0977 , G02B27/18
Abstract: A multi beam laser apparatus is provided to uniform an intensity of output beams by acquiring a plurality of output beams from one laser beam with a one beam splitter. A multi beam laser apparatus includes a laser light source(L), a first reflective mirror(21a), a second reflective mirror(21b), and a diffraction grid beam splitter(22). The laser light source radiates a beam. The first and second reflective mirrors have reflective planes which are arranged in parallel. The diffraction grid beam splitter is arranged between the first and second reflective mirrors, and splits the beam into a penetration beam and a reflective beam. The beam radiated from the laser light source is inputted to the diffraction gird beam splitter at least once by the first and second reflective mirrors, and is split into a plurality of split beams. The split beams are outputted toward the first and second reflective mirrors.
Abstract translation: 提供多光束激光装置以通过从一个激光束与一个分束器获取多个输出光束来均匀输出光束的强度。 多光束激光装置包括激光光源（L），第一反射镜（21a），第二反射镜（21b）和衍射光栅分束器（22）。 激光光源辐射光束。 第一和第二反射镜具有平行布置的反射平面。 衍射网格分束器布置在第一和第二反射镜之间，并将光束分成穿透光束和反射光束。 从激光光源辐射的光束被第一和第二反射镜至少一次输入到衍射线束分束器，并被分成多个分束。 分束被朝向第一反射镜和第二反射镜输出。
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公开(公告)号：KR100790707B1
公开(公告)日：2008-01-02
申请号：KR1020060091606
申请日：2006-09-21
Applicant: 삼성전기주식회사
IPC: G02B21/00
CPC classification number: G02B21/008 , G02B21/0032 , G02B21/0036 , G02B21/0044 , G02B26/02 , G02B26/06
Abstract: A dispersion control confocal laser microscope is provided to measure a photo-luminescent signal for a high-density object at delicate depth resolution in a three-dimensional section. A dispersion control confocal laser microscope is composed of a support unit(27) supporting an object containing materials excited by photons of a first energy; a laser source(21) irradiating a pulse beam for exciting the object; a confocal lens(23b) disposed on the supply unit to form an image on a measurement surface of the object placed on the support unit, by using the laser pulse beam irradiated from the laser source and to receive the light emitted from the object; a detecting unit(26b) disposed on the upper side of the confocal lens to detect energy distribution for the light emitted from the object; a pin hole(25) interposed between the confocal lens and the detecting unit to pass only an emission signal for a co-focus formed on a target surface of the object; a light orienting device(24) positioned between the confocal lens and the pin hole to orient the beam of the laser source to the object and the light generated from the object excited by photons, to the detecting unit; a pulse compressor(29) disposed at an optical path of the laser pulse beam irradiated from the laser source to adjust the pulse width of the pulse beam; and an optical pulse shaper(28) positioned at the optical path of the laser pulse beam irradiated from the laser source to control phase or strength of a wavelength of the pulse beam.
Abstract translation: 提供了一种色散控制共焦激光显微镜，用于在三维部分中以精细的深度分辨率测量高密度物体的光致发光信号。 分散控制共焦激光显微镜由支撑单元（27）组成，所述支撑单元支撑含有由第一能量的光子激发的材料的物体; 激光源（21），照射用于激发所述物体的脉冲光束; 通过使用从激光源照射的激光脉冲束并且接收从物体发射的光，设置在供电单元上以在放置在支撑单元上的物体的测量表面上形成图像的共焦透镜（23b） 设置在所述共焦透镜的上侧的检测单元（26b），用于检测从所述物体发射的光的能量分布; 插入所述共焦透镜和所述检测单元之间的针孔（25），以仅通过形成在所述物体的目标表面上的用于共焦点的发射信号; 位于所述共焦透镜和所述针孔之间的光取向装置（24）将所述激光源的光束与所述物体和从所述光子激发的物体产生的光定向到所述检测单元; 脉冲压缩机（29），设置在从激光源照射的激光脉冲光束的光路上，以调整脉冲光束的脉冲宽度; 以及位于从激光源照射的激光脉冲光束的光路上的光脉冲整形器（28），以控制脉冲光束的波长的相位或强度。
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公开(公告)号：KR1020140129806A
公开(公告)日：2014-11-07
申请号：KR1020130048574
申请日：2013-04-30
Applicant: 삼성전기주식회사
CPC classification number: G06F3/045 , G06F3/044 , G06F2203/04112 , G06F3/041 , G06F3/0412 , G06T7/00 , H01B5/14
Abstract: 본 발명의 일실시예에 따른 터치패널을 포함한 디스플레이 장치는, 도 5에 도시된 바와 같이, 투명기판, 상기 투명기판상에 메쉬패턴으로 형성되는 전극패턴, 상기 전극패턴상에 대응되도록 결합되는 디스플레이부를 포함하고,상기 전극패턴의 피치와 상기 디스플레이부의 픽셀의 피치는 1: 0.3 내지 1: 0.5의 비율을 갖는 것을 특징으로 한다. 본 발명에 따르면, 터치패널의 전극패턴과 터치패널에 결합되는 디스플레이부의 픽셀 패턴 사이에 발생될 수 있는 모아레 현상을 방지할 수 있는 효과가 있다.
Abstract translation: 根据本发明的实施例，包括触摸面板的显示装置包括：透明基板; 形成在所述透明基板上的作为网状图案的电极图案; 以及耦合到透明基板以对应于电极图案的显示单元。 电极图案和显示单元的间距的比例为1:0.3或1:0.5。 本发明可以防止在触摸面板的电极图案与耦合到触摸面板的显示单元的像素图案之间发生莫尔条纹。
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公开(公告)号：KR100862448B1
公开(公告)日：2008-10-08
申请号：KR1020070035514
申请日：2007-04-11
Applicant: 삼성전기주식회사
IPC: G02B27/10
CPC classification number: H01S3/10 , G02B5/1866 , G02B17/006 , G02B27/0905 , G02B27/0977 , G02B27/106 , G02B27/18
Abstract: A multi beam laser apparatus is provided to acquire a plurality of output beams from one laser beam by using one beam splitter. A multi beam laser apparatus includes a laser light source(L), a first reflective mirror(21a), a second reflective mirror(21b), and a beam splitter(22). The laser light source radiates a beam. The first and second reflective mirrors have reflective planes which are arranged in parallel to each other. The beam splitter is arranged between the first and second reflective mirrors, and splits the beam into a penetration beam and a reflective beam. The beam radiated from the laser light source is inputted to the beam splitter at least twice by the first and second reflective mirrors, and is split into a plurality of split beams. The split beams are outputted toward the first and second reflective mirrors.
Abstract translation: 提供多光束激光装置，通过使用一个分束器从一个激光束获取多个输出光束。 多光束激光装置包括激光源（L），第一反射镜（21a），第二反射镜（21b）和分束器（22）。 激光光源辐射光束。 第一和第二反射镜具有彼此平行布置的反射平面。 分束器布置在第一和第二反射镜之间，并将光束分成穿透光束和反射光束。 从激光光源辐射的光束被第一和第二反射镜输入到分束器至少两次，并被分成多个分束。 分束被朝向第一反射镜和第二反射镜输出。
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公开(公告)号：KR100849820B1
公开(公告)日：2008-07-31
申请号：KR1020070035515
申请日：2007-04-11
Applicant: 삼성전기주식회사
IPC: H01S5/183 , H01S5/0625
CPC classification number: H01S5/18302 , G02B27/149 , H01S5/06255
Abstract: A multi beam laser apparatus and a beam splitter are provided to obtain uniform output beam intensity by using only a single beam splitter to generate plural output beams from one laser beam. A multi beam laser apparatus(20) includes a laser source(L), a beam splitter(22), and a reflective mirror(21). The beam splitter divides an incident beam into a projection beam and a reflection beam. The reflective mirror is arranged to be parallel with the beam splitter. The reflection beam is incident on the reflective mirror. The beam outputted from the laser source is applied, such that the beam penetrates the beam splitter at least two times and plural split beams are outputted. The beam splitter includes plural regions, where the reflection beams are applied. An optical transmittance of an n-th region for the reflection beam satisfies Tn=100%/[(N-n)+1], where N is the number of output beams and n is equal to or smaller than N.
Abstract translation: 提供多光束激光装置和分束器以通过仅使用单个分束器从一个激光束产生多个输出光束来获得均匀的输出光束强度。 多光束激光装置（20）包括激光源（L），分束器（22）和反射镜（21）。 分束器将入射光束分成投影光束和反射光束。 反射镜被布置成与分束器平行。 反射光束入射在反射镜上。 施加从激光源输出的光束，使得光束至少穿过分束器两次，并且输出多个分束。 分束器包括施加反射光束的多个区域。 反射光束的第n个区域的光透射率满足Tn = 100％/ [（N-n）+1]，其中N是输出光束的数量，n等于或小于N.
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