-
公开(公告)号：KR102254103B1
公开(公告)日：2021-05-20
申请号：KR1020150002170
申请日：2015-01-07
Applicant: 삼성전자주식회사 , 성균관대학교산학협력단
Abstract: 기판상에그라파이트층을형성하고, 상기그라파이트층 상에지지층을형성하고, 상기기판을제거하고, 상기그라파이트층 및상기지지층의스택을프레임상에전사하고, 및상기지지층을제거하는것을포함하는펠리클제조하는방법이설명된다.
-
公开(公告)号：KR102251999B1
公开(公告)日：2021-05-17
申请号：KR1020150003112
申请日：2015-01-09
Applicant: 삼성전자주식회사 , 성균관대학교산학협력단
IPC: G03F1/64
Abstract: 펠리클의제조방법에있어서, 기판의일 면상에, 상기기판을촉매로사용하는화학반응을이용하여막을형성한다. 상기기판의다른일 면상에, 보호막패턴을형성한다. 상기기판을식각액에침지시켜, 상기보호막패턴으로부터노출된기판부분을제거하여프레임을형성한다. 상기식각액을제1 용매로교환한다.
-
公开(公告)号：KR1020160057217A
公开(公告)日：2016-05-23
申请号：KR1020140158190
申请日：2014-11-13
Applicant: 삼성전자주식회사
IPC: H01L21/027 , G03F1/62 , H01L21/205
CPC classification number: G03F1/62 , G03F1/64 , H01L21/0274
Abstract: 기판을준비하고, 상기기판상에 CVD 공정을수행하여멤브레인을형성하고, 제1 용매내에서상기기판상으로부터상기멤브레인을분리하고, 제2 용매내에서상기분리된멤브레인을린스하고, 및제3 용매내에서상기분리된멤브레인을프레임상으로전사하는것을포함하는펠리클제조방법이설명된다.
Abstract translation: 描述了一种制造具有石墨层的防护薄膜的方法，其包括：制备基底; 通过在基板上进行CVD工艺来形成膜; 在第一溶剂中将膜与基底分离; 在第二溶剂中冲洗分离的膜; 并将分离的膜转移到第三溶剂中的框架上。 因此，可以提供用于极紫外光照相法的防护薄膜组件。
-
公开(公告)号：KR1020150070727A
公开(公告)日：2015-06-25
申请号：KR1020130157275
申请日：2013-12-17
Applicant: 삼성전자주식회사 , 성균관대학교산학협력단 , 주식회사 에프에스티
Abstract: 본원은흑연-함유박막을포함하는극자외선리소그래피용펠리클막에관한것이다.
Abstract translation: 本发明涉及包含含石墨的薄膜的用于极紫外光刻的防护薄膜。
-
公开(公告)号：KR1020140099103A
公开(公告)日：2014-08-11
申请号：KR1020130011936
申请日：2013-02-01
Applicant: 삼성전자주식회사
IPC: G03F1/38 , G03F1/48 , H01L21/027
CPC classification number: G03F1/48 , G03F1/38 , G03F7/70908 , H01L21/0273
Abstract: A photomask according to one embodiment of the present invention comprises a substrate; patterns arranged on the substrate; an anti-contamination layer including at least one graphene layer and arranged right on the patterns.
Abstract translation: 根据本发明的一个实施例的光掩模包括基底; 图案布置在基板上; 包括至少一个石墨烯层并且布置在图案上的抗污染层。
-
Patent Agency Ranking
公开(公告)号：KR1020100107316A
公开(公告)日：2010-10-05
申请号：KR1020090025546
申请日：2009-03-25
Applicant: 삼성전자주식회사 , 성균관대학교산학협력단
IPC: H05B33/22
CPC classification number: H01J31/123 , H01J17/49
Abstract: PURPOSE: An inorganic electroluminescence device and a display apparatus having the same are provided to manufacture a distributive inorganic electroluminescence device having a clear threshold voltage by forming a light emitting layer within a dielectric layer of micro tube shape. CONSTITUTION: A first electrode(110) and a second electrode(120) are formed with a constant distance. A dielectric layer(130) of the micro tube shape is formed between the first electrode and the second electrode. A light emitting layer(140) is formed in order to fill the inner space of the dielectric layer. The second electrode is formed on the light-emitting layer.
Abstract translation: 目的：提供一种无机电致发光器件及其显示装置，通过在微管形状的电介质层内形成发光层来制造具有清晰阈值电压的分布无机电致发光器件。 构成：第一电极（110）和第二电极（120）以恒定距离形成。 在第一电极和第二电极之间形成微管形状的电介质层（130）。 形成发光层（140）以填充电介质层的内部空间。 第二电极形成在发光层上。
-
公开(公告)号：KR1020090041639A
公开(公告)日：2009-04-29
申请号：KR1020070107258
申请日：2007-10-24
Applicant: 삼성전자주식회사 , 성균관대학교산학협력단
CPC classification number: C09K11/025 , C03C17/36 , C03C17/3668 , C03C2217/42 , C09K11/615 , H05B33/10 , Y10T428/25
Abstract: A dispersion type inorganic electro luminescent device and a manufacturing method thereof are provided to simplify a manufacturing process by integrating a light emitting layer and a dielectric layer. The metal oxide precursor solution is mixed with the fluorescent substance. The metal oxide precursor is coated on a plurality of fluorescent substances with the thickness of 10 to 500nm. The coating is performed by an ultrasonic stirrer, a mechanical stirrer, a magnetic mixer or the homogenizer. A plurality of fluorescent substances are laminated between a transparent electrode(2) and an upper electrode(6). The light emitting layer and the dielectric layer are integrated. An integrated electro luminescent layer(5) is formed. In the metal oxide precursor, the metal oxide is selected from the group made of SiO2, Al2O5, BaTiO5 and TiO2.
Abstract translation: 提供了分散型无机电致发光器件及其制造方法，以通过集成发光层和电介质层来简化制造工艺。 金属氧化物前体溶液与荧光物质混合。 金属氧化物前体被涂覆在多个厚度为10-500nm的荧光物质上。 涂层通过超声波搅拌器，机械搅拌器，磁力搅拌器或均化器进行。 多个荧光物质层叠在透明电极（2）和上电极（6）之间。 发光层和电介质层被集成。 形成集成的电致发光层（5）。 在金属氧化物前体中，金属氧化物选自由SiO 2，Al 2 O 5，BaTiO 5和TiO 2制成的组。
-
公开(公告)号：KR1020080105388A
公开(公告)日：2008-12-04
申请号：KR1020070052917
申请日：2007-05-30
Applicant: 삼성전자주식회사
CPC classification number: C08J5/22 , B05D5/12 , B05D7/24 , C01B32/158
Abstract: A method for forming a microparticle film is provided to simplify the process, to allow it to be applied to a soft substrate and to improve environmental friendliness. A method for forming a microparticle film comprises the steps of preparing a hydrophobic microparticle solution(8), a microporous filter(30) and a hydrophobic substrate(10); coating the microparticle of the hydrophobic microparticle solution on the filter to make a filter where a microparticle film is formed; layering the filter and the substrate so as to allow the microparticle film to be located between them; and dipping the layered filter and the substrate into a hydrophilic solution to transfer the microparticle film formed on the filter to the substrate.
Abstract translation: 提供了一种形成微粒膜的方法，以简化工艺，使其适用于柔软的基材并改善环境友好性。 形成微粒膜的方法包括制备疏水性微粒溶液（8），微孔过滤器（30）和疏水性基材（10）的步骤。 将疏水性微粒溶液的微粒涂布在过滤器上，制成形成微粒膜的过滤器; 使过滤器和基板分层以使微粒膜位于它们之间; 并将层状过滤器和基材浸入亲水溶液中以将形成在过滤器上的微粒膜转移到基材上。
-
公开(公告)号：KR102246875B1
公开(公告)日：2021-04-30
申请号：KR1020140158190
申请日：2014-11-13
Applicant: 삼성전자주식회사
IPC: H01L21/027 , G03F1/62 , G03F1/64
Abstract: 기판을준비하고, 상기기판상에 CVD 공정을수행하여멤브레인을형성하고, 제1 용매내에서상기기판상으로부터상기멤브레인을분리하고, 제2 용매내에서상기분리된멤브레인을린스하고, 및제3 용매내에서상기분리된멤브레인을프레임상으로전사하는것을포함하는펠리클제조방법이설명된다.
-
公开(公告)号：KR1020160058306A
公开(公告)日：2016-05-25
申请号：KR1020140158824
申请日：2014-11-14
Applicant: 삼성전자주식회사
IPC: H01L21/027 , G03F1/62
CPC classification number: G03F1/62 , H01L21/0274
Abstract: 본발명은마스크를개시한다. 마스크는마스크기판과, 상기마스크기판상의마스크패턴들과, 상기마스크패턴들외곽의상기마스크기판가장자리상에배치된프레임들과, 상기마스크패턴들로부터이격하여상기프레임들상에배치된펠리클을포함한다. 상기펠리클은나노미터의두께를갖는보호층들을포함할수 있다.
Abstract translation: 本发明公开了一种掩模。 掩模包括掩模基板，掩模基板上的掩模图案，布置在掩模图案的周边的掩模基板的边缘上的框架，以及与掩模图案分离并布置在框架上的防护薄膜组件。 防护薄膜组件可以包括具有几纳米厚度的保护层。
-
-
-
-
-
-
-
-
-
Search Results
20
records
(took 0.021 seconds)
