公开(公告)号：KR1020050029486A

公开(公告)日：2005-03-28

申请号：KR1020030065779

申请日：2003-09-23

Applicant: 삼성전자주식회사

Inventor： 이상범 ,  박덕규 ,  박재찬 ,  안종찬 ,  형우진 ,  박영환 ,  이병찬

IPC: G01N19/10

Abstract: A dew point measurement system is provided to stabilize a measurement value of a dew point measurement sensor and to prevent the dew point measurement sensor from being contaminated. A dew point measurement system includes a chamber(300) and dew point measurement sensors(110a,110b), which are connected to signal transferring sections(112a,112b) through holes formed at an upper portion of the chamber(300). Detection parts(114a,114b) of the dew point measurement sensors(110a,110b) are inserted into the chamber(300). Air of an air feeding duct is introduced into the chamber(300) through an air intake hole(305) of the chamber(300). Humidity of air is detected by the detection parts(114a,114b) of the dew point measurement sensors(110a,110b).

Abstract translation: 提供露点测量系统来稳定露点测量传感器的测量值并防止露点测量传感器被污染。 露点测量系统包括通过形成在腔室（300）的上部的孔连接到信号传送部分（112a，112b）的腔室（300）和露点测量传感器（110a，110b）。 露点测量传感器（110a，110b）的检测部件（114a，114b）插入到室（300）中。 空气供给管道的空气通过室（300）的进气孔（305）被引入室（300）。 露点测量传感器（110a，110b）的检测部（114a，114b）检测空气的湿度。

公开(公告)号：KR1020020085113A

公开(公告)日：2002-11-16

申请号：KR1020010024397

申请日：2001-05-04

Applicant: 삼성전자주식회사

Inventor： 박재찬 ,  박덕규 ,  김종한 ,  이병찬

IPC: G01K1/20

CPC classification number: G01K1/16

Abstract: PURPOSE: A clean room temperature sensor apparatus is provided to achieve improved temperature response characteristics, while allowing maintenance to be easily performed. CONSTITUTION: A clean room temperature sensor apparatus, comprises a housing(30); a cover pipe(40) protruded from the outer periphery of the housing, and which has an open end; a lead wire protection pipe(50) disposed within the cover pipe, and which has an outer diameter smaller than the inner diameter of the cover pipe, and which is protruded from the outer periphery of the housing; and a temperature sensor(60) disposed within the cover pipe and coupled to the end of the protection pipe in such a manner that the end of the temperature sensor is attachable/separatable to/from the end of the protection pipe. A plurality of lead wires(66) led from the end of the temperature sensor, are extended into the housing through the interior of the lead wire protection pipe. The temperature sensor is constituted by a rod having a temperature sensor element exposed at an end of the rod.

Abstract translation: 目的：提供一种洁净的室温传感器装置，以实现改善的温度响应特性，同时可以方便地进行维护。 构成：洁净室温传感器装置，包括壳体（30）; 从所述壳体的外周突出并具有开口端的盖管（40） 设置在所述盖管内的引线保护管（50），其外径小于所述盖管的内径，并且从所述壳体的外周突出; 以及温度传感器（60），其设置在所述盖管内并且以使得所述温度传感器的端部能够与所述保护管的端部附接/分离的方式联接到所述保护管的端部。 从温度传感器的端部引出的多根引线（66）通过引线保护管的内部延伸到壳体中。 温度传感器由具有暴露在杆的端部的温度传感器元件的杆构成。

公开(公告)号：KR100419923B1

公开(公告)日：2004-02-25

申请号：KR1020010024397

申请日：2001-05-04

Applicant: 삼성전자주식회사

Inventor： 박재찬 ,  박덕규 ,  김종한 ,  이병찬

IPC: G01K1/20

CPC classification number: G01K1/16

Abstract: A temperature sensor device for use in a clean room has a housing, a covering tube extending from the housing, a lead wire protecting tube extending from the housing within the covering tube, and a generally cylindrical temperature sensor also disposed within the covering tube. A fixing end of the temperature sensor is detachably coupled to a distal end of the lead wire protecting tube. A plurality of lead wires protrude from the fixing end and extend through the lead wire protecting tube and into the housing. The temperature sensor includes a temperature sensor element at a free end thereof. The covering tube has at least one hole by which the temperature sensor element is exposed to the atmosphere. Accordingly, the temperature sensor is highly responsive to changes in temperature, and can be repaired, maintained or replaced with ease.

Abstract translation: 用于洁净室的温度传感器装置具有壳体，从壳体延伸的覆盖管，在覆盖管内从壳体延伸的引线保护管以及也设置在覆盖管内的大致圆柱形的温度传感器。 温度传感器的固定端可拆卸地连接到引线保护管的远端。 多根引线从固定端突出并延伸穿过引线保护管并进入壳体。 温度传感器在其自由端包括温度传感器元件。 覆盖管具有至少一个孔，温度传感器元件通过该孔暴露于大气。 因此，温度传感器对温度变化响应性高，并且可以容易地修复，维护或更换。