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公开(公告)号：KR101678041B1
公开(公告)日：2016-11-21
申请号：KR1020100014020
申请日：2010-02-17
Applicant: 삼성전자주식회사
Inventor： 박연묵
Abstract: 본발명의일 측면은단 행정스캐너와장 행정스캐너를모두이용하여시료의 3차원형상을고속으로정밀하게측정할수 있는원자간힘 현미경및 이를이용한시료측정방법에관한것으로, 본발명의실시예에따른원자간힘 현미경은시료를이송하는스테이지와, 탐침이부착되어시료의원자와의인력과척력에의해구동변위및 구동주파수가변하는적어도하나의캔틸레버와, 캔틸레버가부착되어시료를단 행정스캔하기위한적어도하나의단 행정스캐너와, 단행정스캐너가부착되어시료를장 행정스캔하기위한적어도하나의장 행정스캐너와, 단행정스캐너와장 행정스캐너를시료로이동시키는적어도하나의조동접근시스템을포함하는것을특징으로한다.
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公开(公告)号：KR101107511B1
公开(公告)日：2012-02-06
申请号：KR1020100030375
申请日：2010-04-02
Applicant: 삼성전자주식회사
Inventor： 박연묵
CPC classification number: G01Q60/30
Abstract: 탐침과 시료 사이에 전기장을 생성시켜 정전기력을 유도하면서 시료를 고속으로 스캔하고 이 정전기력에 의한 캔틸레버의 진동 변위 변화로부터 시료의 표면 형상을 생성하여 표시함으로서 시료의 표면에 손상을 입히지 않으면서도 시료의 결함을 빠르고 정밀하게 검사하는 시료 검사장치 및 그 시료 검사방법을 개시한다.
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公开(公告)号：KR1020130075527A
公开(公告)日：2013-07-05
申请号：KR1020110143920
申请日：2011-12-27
Applicant: 삼성전자주식회사
IPC: H01L21/58
CPC classification number: H01L24/75 , H01L2224/7592
Abstract: PURPOSE: A die attaching apparatus is provided to improve the reliability of a semiconductor package by determining the mounting failure of a semiconductor die. CONSTITUTION: A collet member (110) moves to apply a load to a stage (180). A load measuring member (120) measures a load between the stage and the collet member. A control unit (140) determines the tilt of the collet member. An absorption member (130) absorbs a semiconductor die (190). A mount head member (160) is fixed to a main body (170). A shaft member (150) is fixed to the mount head member.
Abstract translation: 目的：提供一种贴片装置，通过确定半导体管芯的安装故障来提高半导体封装的可靠性。 构成：夹头构件（110）移动以将负载施加到台架（180）。 载荷测量构件（120）测量载物台和夹头构件之间的载荷。 控制单元（140）确定夹头构件的倾斜。 吸收构件（130）吸收半导体管芯（190）。 安装头构件（160）固定到主体（170）。 轴构件（150）固定到安装头构件。
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公开(公告)号：KR1020110132150A
公开(公告)日：2011-12-07
申请号：KR1020100051999
申请日：2010-06-01
Applicant: 삼성전자주식회사
Inventor： 박연묵
CPC classification number: G01Q80/00 , G01B21/30 , G01N27/025 , G02F1/1303
Abstract: PURPOSE: A device for inspecting a specimen is provided to inspect the normal operation of a corresponding pixel by measuring induce-current to a cantilever through a current measurement device. CONSTITUTION: A probe(306) is prepared in a plurality of cantilevers(307). The induced current flows tot eh cantilever. To generated a surface charge, a voltage supplier supplies the voltage to the probe and sample. A current measurement unit measures the current on a cantilever from a probe. A controller scans pixels of the sample to the probe through a moving device(321). Based on the measured current value, the controller determined the failure of a corresponding pixel.
Abstract translation: 目的：提供一种用于检查样本的装置，通过通过电流测量装置测量对悬臂的感应电流来检查相应像素的正常操作。 构成：在多个悬臂（307）中制备探针（306）。 感应电流流向悬臂梁。 为了产生表面电荷，电压供应器将电压提供给探头和样品。 电流测量单元测量探头悬臂上的电流。 控制器通过移动装置（321）将样品的像素扫描到探针。 基于测量的电流值，控制器确定相应像素的故障。
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公开(公告)号：KR1020110094557A
公开(公告)日：2011-08-24
申请号：KR1020100014020
申请日：2010-02-17
Applicant: 삼성전자주식회사
Inventor： 박연묵
Abstract: PURPOSE: An atomic force microscope and sample measurement method using the same are provided to accurately measure the 3D shape of a sample by scanning the sample through a probe and using a long stroke scanner and a short stroke scanner. CONSTITUTION: A sample is transferred to a stage. A probe(10A) is attached to one or more cantilevers(10). The cantilever changes a driving displacement and a driving frequency. The cantilever is attached to one or more short stroke scanners(200). The short stroke scanner short-stroke scans the sample. The short stroke scanner is attached to one or more long stroke scanners(300). The long stroke scanner long-stroke scans the sample.
Abstract translation: 目的：提供使用其的原子力显微镜和样品测量方法，以通过扫描样品并使用长行程扫描仪和短行程扫描仪来精确测量样品的3D形状。 规定：将样品转移到舞台上。 探针（10A）附接到一个或多个悬臂（10）。 悬臂改变驱动位移和驱动频率。 悬臂连接到一个或多个短冲程扫描器（200）。 短行程扫描仪短行扫描样品。 短行程扫描仪连接到一个或多个长行程扫描器（300）。 长扫描长扫描长扫描样品。
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Patent Agency Ranking
公开(公告)号：KR101878839B1
公开(公告)日：2018-08-20
申请号：KR1020110077649
申请日：2011-08-04
Applicant: 삼성전자주식회사
CPC classification number: G02F1/133382 , G02F1/1303 , G02F1/1341
Abstract: 엘씨디셀 내부에주입되는액정에열을빨리전달하여액정이액체상태로변하는데걸리는시간을단축시키고, 액정의확산을물리적으로촉진하여균일한액정분포를만들수 있는엘씨디셀 열처리장치및 방법을제공한다. 두장의글래스사이에액정이주입된복수의엘씨디셀을열처리하여상기복수의엘씨디셀 내부액정의분포를균일하게하는엘씨디셀 열처리장치는상기복수의엘씨디셀 내부의액정에열을전달하는매질인액체가담겨지는수조; 상기수조에상기복수의엘씨디셀을투입및 배출하는로딩장치; 상기수조에투입된상기복수의엘씨디셀 내부의액정에열을전달하기위해상기수조내부에설치되어상기수조내부의액체를가열하는열 발생기; 상기수조내부에설치되어상기복수의엘씨디셀 내부의액정에음파를전달하는음파전달기;를포함하는것을특징으로한다.
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公开(公告)号：KR1020130015588A
公开(公告)日：2013-02-14
申请号：KR1020110077649
申请日：2011-08-04
Applicant: 삼성전자주식회사
CPC classification number: G02F1/133382 , G02F1/1303 , G02F1/1341
Abstract: PURPOSE: An LCD(Liquid Crystal Display) cell heat treatment device and a method thereof are provided to improve a removing performance for a heat treatment stain by uniformly distributing heat on liquid crystal. CONSTITUTION: Liquid is filled in a water tank(10). Heat is conducted to liquid crystal of LCD cells through the liquid. A loading unit(20) inserts the LCD cells into the water tank or discharges the LCD cells from the water tank. A heat generator(30) heats the liquid inside the water tank. A sound wave transmission unit(40) transmits a sound wave to the liquid crystal of the LCD cells.
Abstract translation: 目的：提供一种LCD（液晶显示器）电池热处理装置及其方法，通过在液晶上均匀分布热量来提高热处理污渍的去除性能。 构成：液体填充在水箱（10）中。 通过液体对LCD电池的液晶进行加热。 装载单元（20）将LCD单元插入水箱或从水箱排出LCD单元。 发热体（30）加热水箱内的液体。 声波传输单元（40）将声波发送到LCD单元的液晶。
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公开(公告)号：KR1020110136205A
公开(公告)日：2011-12-21
申请号：KR1020100056055
申请日：2010-06-14
Applicant: 삼성전자주식회사
CPC classification number: G01Q10/04
Abstract: PURPOSE: A high speed and high precise atomic force microscope is provided to bear a small measuring areas by the cantilever of a rapid speed and a large measuring area by a Z axis scanner. CONSTITUTION: A probe(16) is prepared to a cantilever(15). By the functional force between the atom of a probe and the atom of a sample surface, a vibration displacement is changed. Displacement measurement devices(19,20~24) examine the beam of a light source(20) to the cantilever. The displacement measuring device measured the displacement of the cantilever from the beam which is reflected by the cantilever. The scanning the sample, moving device(13,14) moves the cantilever and the displacement measuring device at the same time.
Abstract translation: 目的：提供高速高精度原子力显微镜，通过Z轴扫描仪通过快速和大测量面积的悬臂承受小的测量区域。 构成：将探头（16）准备到悬臂（15）。 通过探针的原子与样品表面的原子之间的功能力，振动位移发生变化。 位移测量装置（19,20〜24）检查光源（20）的光束到悬臂。 位移测量装置测量由悬臂反射的梁的悬臂的位移。 扫描样品，移动装置（13,14）同时移动悬臂和位移测量装置。
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公开(公告)号：KR1020110111009A
公开(公告)日：2011-10-10
申请号：KR1020100030375
申请日：2010-04-02
Applicant: 삼성전자주식회사
Inventor： 박연묵
CPC classification number: G01Q60/30
Abstract: 탐침과 시료 사이에 전기장을 생성시켜 정전기력을 유도하면서 시료를 고속으로 스캔하고 이 정전기력에 의한 캔틸레버의 진동 변위 변화로부터 시료의 표면 형상을 생성하여 표시함으로서 시료의 표면에 손상을 입히지 않으면서도 시료의 결함을 빠르고 정밀하게 검사하는 시료 검사장치 및 그 시료 검사방법을 개시한다.
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公开(公告)号：KR1020120135636A
公开(公告)日：2012-12-17
申请号：KR1020110054457
申请日：2011-06-07
Applicant: 삼성전자주식회사
Inventor： 박연묵
IPC: H01L21/02 , H01L21/683
CPC classification number: H01L21/6838 , Y10T29/49998
Abstract: PURPOSE: A substrate frame absorption device and a control method thereof are provided to prevent twisting and bending of a substrate frame by successively gradually absorbing the substrate frame on an adsorption plate. CONSTITUTION: A body comprises one chamber(21a) which opens an upper side. An adsorption plate(22) covers the upper side of the chamber. The adsorption plate is formed with the porous material. A pressure controlling device(23) is connected to chamber and controls pressure of the chamber. One chamber comprises a plurality of chambers which is divided through a partition wall.
Abstract translation: 目的：提供一种基板框架吸收装置及其控制方法，以通过在吸附板上逐渐吸收基板框架来防止基板框架的扭曲和弯曲。 构成：身体包括打开上侧的一个腔室（21a）。 吸附板（22）覆盖室的上侧。 吸附板由多孔材料形成。 压力控制装置（23）连接到腔室并控制腔室的压力。 一个室包括通过分隔壁分隔的多个室。
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