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公开(公告)号：KR1020020089787A
公开(公告)日：2002-11-30
申请号：KR1020010028689
申请日：2001-05-24
Applicant: 삼성전자주식회사
IPC: H01H59/00
Abstract: PURPOSE: An RF MEMS(Micro Electro Mechanical System) switch is provided to reduce an insertion loss when an RF switch is turned on and improve a signal separation characteristic when the RF switch is turned off. CONSTITUTION: An input signal line(112) and two output signal lines(114) are formed on a dielectric substrate(100). An RF ground is formed on both sides of the input signal line(112) and the output signal lines(114). A gap(116) is formed between the input signal line(112) and the output signal lines(114). A contact plate(130) is formed to an upper direction of the gap(116). A driving electrode(140) is formed at both sides of the gap(116). A plurality of anchors(142) are formed on the driving electrode(140). A plurality of driving beams(144) are extended to an opposite direction of the anchors(142). An insulating portion(160) is inserted between the driving beams(144) and the contact plate(130). An insulating layer is formed on an RF ground(120) contacted with the driving beams(144). The RF grounds(120) are connected each other with a bridge(150). The bridge(150) is formed with a pillar(152) and a beam(154).
Abstract translation: 目的：提供RF MEMS（微机电系统）开关，以在RF开关接通时减少插入损耗，并在RF开关关闭时提高信号分离特性。 构成：在电介质基板（100）上形成输入信号线（112）和两条输出信号线（114）。 在输入信号线（112）和输出信号线（114）的两侧形成RF接地。 在输入信号线（112）和输出信号线（114）之间形成间隙（116）。 接触板（130）形成在间隙（116）的上方。 驱动电极（140）形成在间隙（116）的两侧。 多个锚固件（142）形成在驱动电极（140）上。 多个驱动梁（144）延伸到锚固件（142）的相反方向。 绝缘部分（160）插入在驱动梁（144）和接触板（130）之间。 绝缘层形成在与驱动梁（144）接触的RF接地（120）上。 RF接地（120）通过桥（150）彼此连接。 桥（150）形成有支柱（152）和梁（154）。
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Patent Agency Ranking
公开(公告)号：KR100387241B1
公开(公告)日：2003-06-12
申请号：KR1020010028689
申请日：2001-05-24
Applicant: 삼성전자주식회사
IPC: H01H59/00
Abstract: PURPOSE: An RF MEMS(Micro Electro Mechanical System) switch is provided to reduce an insertion loss when an RF switch is turned on and improve a signal separation characteristic when the RF switch is turned off. CONSTITUTION: An input signal line(112) and two output signal lines(114) are formed on a dielectric substrate(100). An RF ground is formed on both sides of the input signal line(112) and the output signal lines(114). A gap(116) is formed between the input signal line(112) and the output signal lines(114). A contact plate(130) is formed to an upper direction of the gap(116). A driving electrode(140) is formed at both sides of the gap(116). A plurality of anchors(142) are formed on the driving electrode(140). A plurality of driving beams(144) are extended to an opposite direction of the anchors(142). An insulating portion(160) is inserted between the driving beams(144) and the contact plate(130). An insulating layer is formed on an RF ground(120) contacted with the driving beams(144). The RF grounds(120) are connected each other with a bridge(150). The bridge(150) is formed with a pillar(152) and a beam(154).
Abstract translation: 目的：提供RF MEMS（微机电系统）开关，以减少RF开关打开时的插入损耗，并改善RF开关关闭时的信号分离特性。 构成：在电介质基板（100）上形成输入信号线（112）和两条输出信号线（114）。 在输入信号线（112）和输出信号线（114）的两侧形成RF地。 在输入信号线（112）和输出信号线（114）之间形成间隙（116）。 接触板（130）形成在间隙（116）的上方。 驱动电极（140）形成在间隙（116）的两侧。 在驱动电极（140）上形成多个锚（142）。 多个驱动梁（144）延伸到锚（142）的相反方向。 在驱动梁（144）和接触板（130）之间插入绝缘部分（160）。 在与驱动梁（144）接触的RF接地（120）上形成绝缘层。 RF接地（120）通过桥（150）相互连接。 桥（150）形成有柱（152）和梁（154）。
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公开(公告)号：KR1020000061886A
公开(公告)日：2000-10-25
申请号：KR1019990011267
申请日：1999-03-31
Applicant: 삼성전자주식회사
Abstract: PURPOSE: A cavity resonator is provided to reduce a phase noise of an electromagnetic wave radiated MMIC(Monolithic Microwave Integrated Circuit) VCO(Voltage Controlled Oscillator) for accepting a silicone micromachined cavity in a pressure control oscillator of a reflection type. CONSTITUTION: A cavity resonator includes a cavity(500), a microstrip line(400) and a slot(210). The cavity(500) is made by a fine processing of a silicone and a micro electro mechanical system instead of a metal cavity and a lower thin film of the cavity with a rectangular parallelepiped type is made of a gold thin film and the thin film(200) of a ground plane covers the top of the lower thin film of the cavity. A film as the micro electro mechanical system is inserted between microstrip line(400) and the thin film(200) of top ground plane to maintain a direct way. And in an 1-slot cavity resonator, a signal from VCO is sent through the gold strip line(400) an electromagnetic wave mode in the cavity is made by an electromagnetic wave coupling of the strip line(400) and the cavity(500). In this coupling a slot(210) is used and the stable electromagnetic mode is sent to the strip line through the slot and is radiated through the antenna.
Abstract translation: 目的：提供一种空腔谐振器，以减少电磁波辐射MMIC（单片微波集成电路）VCO（压控振荡器）的相位噪声，用于接收反射型压力控制振荡器中的硅树脂微加工腔。 构成：空腔谐振器包括空腔（500），微带线（400）和狭槽（210）。 空腔（500）通过硅树脂和微机电系统的精细加工而不是金属空腔制成，并且具有长方体形状的空腔的下薄膜由金薄膜和薄膜（ 接地平面的200）覆盖空腔的下薄膜的顶部。 将微电子机械系统的薄膜插入到微带线（400）和顶部接地平面的薄膜（200）之间以保持直接的方式。 并且在1槽空腔谐振器中，来自VCO的信号通过金带线（400）发送，空腔中的电磁波模式由带状线（400）和空腔（500）的电磁波耦合构成， 。 在该耦合中，使用槽（210），并且通过该槽将稳定的电磁模式发送到带状线并通过天线辐射。
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公开(公告)号：KR100552658B1
公开(公告)日：2006-02-17
申请号：KR1019990011267
申请日：1999-03-31
Applicant: 삼성전자주식회사
Abstract: 본 발명은 반도체(실리콘, GaAs, InP 등) 미세가공 기술을 이용하여 MMIC(Monolithic Microwave Integrated Circuit) VCO(Voltage Controlled Oscillator)에서 방사하는 전자기파의 위상잡음을 감소시키기 위한 공동공진기를 기재한다. 본 발명에 따른 본 발명에 따른 전압제어발진기의 위상잡음 감소용 공동공진기는 기존의 금속 공동(metal cavity) 대신 실리콘이나 화합물 반도체를 미세가공한 공동(空洞)을 반사형의 전압제어발진기에 채용할 수 있도록 마이크로스트립 라인(microstrip line)과 결합시키고, 이 마이크로스트립 라인과 대응하는 공동의 상부 접지면 금속 박막을 소정 규격으로 제거한 격리용 슬랏(isolation slot)을 형성함으로써, 전압제어발진기에서 출력되는 마이크로/밀리미터파의 위상 잡음을 감소시킨다.
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公开(公告)号：KR100513709B1
公开(公告)日：2005-09-07
申请号：KR1019990011266
申请日：1999-03-31
Applicant: 삼성전자주식회사
CPC classification number: H01P5/107 , H01P7/065 , H01P11/008
Abstract: Si 혹은 화합물 반도체와 MEMS(micro electro mechanical system) 기술을 이용하여 MMIC(Monolithic Microwave Integrated Circuit) VCO(Voltage Controlled Oscillator)에서 출력되는 마이크로/밀리미터파의 위상잡음을 감소시킬 수 있는 새로운 공동 공진기(cavity resonator) 및 그 제작 방법에 관해 기술된다. 본 발명에 따른 전압제어발진기의 위상 잡음 감소용 공동공진기는 기존의 금속 공동(metal cavity) 대신 실리콘이나 화합물 반도체를 미세가공한 공동(空洞)을 반사형의 전압제어발진기에 채용할 수 있도록 마이크로스트립 라인(microstrip line)과 결합시키되, 마이크로 스트립 라인의 가장자리 부분과 공동의 하부 박막의 소정 위치를 연결하는 폴(pole)을 구비하고, 이 폴과 만나는 공동의 상부 박막을 소정폭 제거한 격리용 슬랏(isolation slot)을 형성하며, 이 폴과 만나는 공동 하부 박막의 주변에는 임피던스 매칭을 위한 저항 박막을 형성함으로써, 전압제어발진기에서 출력되는 마이크로/밀리미터파의 위상 잡음을 감소시킬 수 있다.
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公开(公告)号：KR1020000061885A
公开(公告)日：2000-10-25
申请号：KR1019990011266
申请日：1999-03-31
Applicant: 삼성전자주식회사
CPC classification number: H01P5/107 , H01P7/065 , H01P11/008
Abstract: PURPOSE: A cavity resonator for reducing a phase noise of a voltage control oscillator and a manufacturing method thereof are provided to reduce a phase noise of a voltage control oscillator by using a cavity with a fine processing of a silicone and a micro electro mechanical system instead of a metal cavity and by combining a microstrip line and a cavity for using in a voltage control oscillator of a reflection type. CONSTITUTION: A cavity resonator for reducing the phase noise of a voltage control oscillator includes a cavity(10, 20), a microstrip line(30), a pole , an isolation slot and a resistance thin film. The cavity is made by processing a semiconductor into a rectangular parallelepiped type and the pole couples the edge of microstrip line and the lower thin film of the cavity and the isolation slot is made by removing the part as a fixed width, which contacts with a pole of higher thin film and the resistance thin film is made for impedance matching around the lower thin film of the cavity which contacts with the pole. Thereby the phase noises of the voltage control oscillator are reduced.
Abstract translation: 目的：提供一种用于降低电压控制振荡器的相位噪声的空腔谐振器及其制造方法，以通过使用具有硅树脂和微机电系统的精细加工的腔来降低压控振荡器的相位噪声 并且通过组合微带线和空腔以在反射型的电压控制振荡器中使用。 构成：用于降低电压控制振荡器的相位噪声的空腔谐振器包括空腔（10,20），微带线（30），极，隔离槽和电阻薄膜。 通过将半导体处理成长方体形成腔，并且极耦合微带线的边缘和空腔的下部薄膜，并且隔离槽通过将部件移除为固定宽度而制成，该固定宽度与极接触 的高电薄膜，并且电阻薄膜被制成围绕与极接触的腔的下薄膜的阻抗匹配。 从而降低了压控振荡器的相位噪声。
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