반도체 설비의 계측기 관리 시스템 및 방법
    1.
    发明公开
    반도체 설비의 계측기 관리 시스템 및 방법 无效
    用于控制半导体设备的测量单元的系统和方法以避免控制数量的丢失并提高工作效率

    公开(公告)号:KR1020050001296A

    公开(公告)日:2005-01-06

    申请号:KR1020030042900

    申请日:2003-06-28

    Abstract: PURPOSE: A system for controlling a measuring unit of semiconductor equipment is provided to avoid a loss of a control number by attaching and recognizing a bar code, and to improve work efficiency by simultaneously monitoring the information of a plurality of measuring units. CONSTITUTION: A bar code recognizing part(110) recognizes the bar code attached to a measuring unit for measuring semiconductor equipment. Based upon the data detected by the bar code recognizing part, a control part(120) searches for the information of semiconductor equipment coinciding with the data. A display part(140) receives the information of the semiconductor equipment from the control part and displays the received information.

    Abstract translation: 目的:提供一种用于控制半导体设备的测量单元的系统,以通过附加和识别条形码来避免控制数量的损失,并且通过同时监视多个测量单元的信息来提高工作效率。 条款:条形码识别部分(110)识别附接到用于测量半导体设备的测量单元的条形码。 基于由条形码识别部检测出的数据,控制部(120)搜索与数据一致的半导体装置的信息。 显示部分(140)从控制部分接收半导体设备的信息并显示所接收的信息。

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