Abstract:
본발명의레티클에러검출방법은노광기에장착된레티클에노광기의광원을이용하여광을조사하고, 레티클을통과하여나오는회절광들중 0차회절광만으로레티클의에러를검출하는것을포함한다. 0차회절광은상기노광기에레티클의패턴에따라서조명계를선택하여얻어질수 있다. 레티클에러는노광기에장착된웨이퍼상의포토레지스트막을현상한후 포토레지스트막의두께변화나이미지를분석하여얻어질수 있다.
Abstract:
질량체를 이용한 에너지 하베스터 및 이를 구비하는 모바일 기기가 개시된다.개시된 에너지 하베스터는, 질량체(mass)와, 서로 이격되게 마련되는 것으로 그 중 적어도 하나는 상기 질량체와 연결되는 제1 및 제2 기판과, 상기 제1 및 제2 기판 상에 마련되는 제1 및 제2 전극과, 상기 제1 및 제2 전극 사이에 마련되는 것으로 상기 질량체의 움직임에 의해 가해지는 기계적인 힘을 이용하여 전기에너지를 발생시키는 에너지 발생소자;를 포함한다.
Abstract:
PURPOSE: A heat recovery method and an apparatus are provided to effectively cool a stack of a fuel cell system, and to effectively collect the heat from an electric heater using a surplus power generated from the operation of a fuel cell. CONSTITUTION: A heat recovery apparatus(100) inside a fuel cell system comprises the following: a storage tank(105) storing heated water; a pump(110) discharging the water inside the storage tank; a first heat exchanger(115) to collect the heat from cooling water discharged from a stack; a second heat exchanger(120) to collect the heat from an electric heater; a third heat exchanger(125) to collect the heat from anode-off gas; a fourth heat exchanger(130) collecting the heat from air discharged from the stack; a fifth heat exchanger(135) to collect the heat from exhaust gas exhausted from a reformer; an electronic valve(140); a proportional valve(145); a first thermocouple(150); a second thermocouple(155); and a third thermocouple(160).
Abstract:
A fuel cell, and a method for control the fuel cell are provided to increase temperature by the rapid and economical method from the initial operation of a fuel cell to the normal operation. A fuel cell(10) comprises a reformer(20) which generates the fuel gas and heat by-product due to reformation; a stack(40) which is provided with the fuel gas generated at the reformer to generates energy; a preheating unit(60) which heats the stack to help the and the pre-heating unit helps the operation of the stack; and an operation movement control unit which supplies at least one of the fuel gas and heat by-product generated at the reformer to the preheating unit during the initial operation of the reformer, and supplies the fuel gas generated at the reformer to stack when the initial operation is terminated.