Abstract:
본 발명은 전해질의 다양한 이온 농도를 선택적으로 측정할 수 있고, 동시에 투명하게 제조됨으로써 광학적 측정이 가능하여 셀의 거동현상도 측정이 가능하며, 용액에 의한 이온 감지부의 열화를 방지하기 위해 이온 감지부가 트랜지스터의 채널부로부터 연장된 게이트 전극 상에 위치하도록 구성되어 내구성이 향상된 전계효과 트랜지스터형 신호변환기를 이용한 투명성 이온 감지 센서칩 및 이의 제조방법에 관한 것이다.
Abstract:
PURPOSE: A transparent ion detecting sensor chip using field-effect transistor type signal converters in which an extended gate electrode is formed and a manufacturing method thereof are provided to optically observe real time fetal movement of a cell and to selectively detect an ion by converting a potential difference caused by various ion changes into a changes of a current value. CONSTITUTION: A transparent ion detecting sensor chip(200) using field-effect transistor type signal converters in which an extended gate electrode(110) comprises a transparent substrate(100), an ion detecting sensor, and a passivation thin film(190). The ion detecting sensor comprises a detection thin film(120) and a selective ion penetrating film(130), and a well(140). The detecting film is formed on the transparent substrate and composed of an indum tin oxcide or graphene. The selective ion penetrating film is arranged in the upper part of the detecting thin film. The well covers the selective ion penetrating film and accommodates electrolyte. The gate electrode is electrically connected to the detecting thin film. The passivation thin film is formed on a field-effect transistor type signal converter.