연장된 게이트 전극이 형성된 전계효과 트랜지스터형 신호변환기를 이용한 투명성 이온 감지 센서칩 및 이의 제조방법
    2.
    发明公开
    연장된 게이트 전극이 형성된 전계효과 트랜지스터형 신호변환기를 이용한 투명성 이온 감지 센서칩 및 이의 제조방법 有权
    具有扩展门电极的场效应晶体管信号传感器的透明检测传感器芯片及其制备方法

    公开(公告)号:KR1020120085211A

    公开(公告)日:2012-07-31

    申请号:KR1020120006934

    申请日:2012-01-20

    CPC classification number: G01N27/414

    Abstract: PURPOSE: A transparent ion detecting sensor chip using field-effect transistor type signal converters in which an extended gate electrode is formed and a manufacturing method thereof are provided to optically observe real time fetal movement of a cell and to selectively detect an ion by converting a potential difference caused by various ion changes into a changes of a current value. CONSTITUTION: A transparent ion detecting sensor chip(200) using field-effect transistor type signal converters in which an extended gate electrode(110) comprises a transparent substrate(100), an ion detecting sensor, and a passivation thin film(190). The ion detecting sensor comprises a detection thin film(120) and a selective ion penetrating film(130), and a well(140). The detecting film is formed on the transparent substrate and composed of an indum tin oxcide or graphene. The selective ion penetrating film is arranged in the upper part of the detecting thin film. The well covers the selective ion penetrating film and accommodates electrolyte. The gate electrode is electrically connected to the detecting thin film. The passivation thin film is formed on a field-effect transistor type signal converter.

    Abstract translation: 目的:一种使用场效应晶体管型信号转换器的透明离子检测传感器芯片,其中形成有延伸的栅电极及其制造方法,以光学地观察细胞的实时胎动,并通过转换 由各种离子变化引起的电位差变为电流值的变化。 构成:使用场效应晶体管型信号转换器的透明离子检测传感器芯片(200),其中延伸的栅电极(110)包括透明基板(100),离子检测传感器和钝化薄膜(190)。 离子检测传感器包括检测薄膜(120)和选择性离子穿透膜(130)和井(140)。 检测膜形成在透明基板上,由氧化锡或石墨烯构成。 选择性离子穿透膜布置在检测薄膜的上部。 该井覆盖选择性离子穿透膜并容纳电解质。 栅电极与检测薄膜电连接。 钝化薄膜形成在场效应晶体管型信号转换器上。

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