公开(公告)号：KR101553916B1

公开(公告)日：2015-09-30

申请号：KR1020130125810

申请日：2013-10-22

Applicant: 숭실대학교산학협력단

Inventor： 안형준 ,  유요한 ,  지용혁

IPC: H02K41/02

Abstract: 본발명인반발력보상이가능한선형운동스테이지장치는자석트랙, 상기자석트랙을따라선형이동하는이동자, 상기이동자의위치및 상기자석트랙의위치를측정하는위치측정부, 상기자석트랙에대한상기이동자의상대위치를산출하는상대위치산출부및 상기산출된상대위치에기초하여상기자석트랙에대한상기이동자의상대속도를산출하고이에기초하여상기이동자의추력명령을보상하는보상부를포함한다.

公开(公告)号：KR1020140146987A

公开(公告)日：2014-12-29

申请号：KR1020130125810

申请日：2013-10-22

Applicant: 숭실대학교산학협력단

Inventor： 안형준 ,  유요한 ,  지용혁

IPC: H02K41/02

CPC classification number: H02K41/02 ,  H02P25/06

Abstract: A linear motion stage apparatus with the capability of compensating a reaction force of the present invention includes a magnetic track, a mover linearly moving along the magnetic track, a position measuring unit measuring positions of the mover and the magnetic track, a relative position calculating unit calculating a relative position of the mover to the magnetic track, and a compensating unit calculating a relative speed of the mover to the magnetic track based on the calculated relative position and compensating a thrust command for the mover based on the calculation of the relative speed.

Abstract translation: 具有补偿本发明的反作用力的线性运动台装置包括磁道，沿着磁道线性移动的动子，测量动子和磁迹的位置的位置测量单元，相对位置计算单元 计算移动器与磁道的相对位置，以及补偿单元，基于计算出的相对位置来计算移动体相对于磁迹的相对速度，并且基于相对速度的计算来补偿动子的推力指令。