公开(公告)号：KR100031111B1

公开(公告)日：1990-01-11

申请号：KR1019850004927

申请日：1985-07-11

Applicant: 스미토모덴키고교가부시키가이샤

Inventor： 이시구로요오이찌 ,  가와우찌히로시 ,  다나까고오따로오 ,  교오도미찌히사

IPC: C03B37/018 ,  C03B20/00

公开(公告)号：KR1020020082786A

公开(公告)日：2002-10-31

申请号：KR1020020022371

申请日：2002-04-24

Applicant: 스미토모덴키고교가부시키가이샤

Inventor： 사까따나오끼 ,  마에무라고이찌로 ,  가와우찌히로시 ,  야시끼데쯔오 ,  다까하시도시야 ,  오하라도시아끼

IPC: H01L21/60

Abstract: PURPOSE: A bonding tool, a bonding stage, a head for bonding the tool and a stage part for the bonding stage are provided to be capable of replacing the head at the bonding tool and the bonding stage. CONSTITUTION: A boding tool or a bonding stage for mounting semiconductor is composed of a head part(1) and a shank part(14) or a pedestal part. The bonding tool is characterized in that the head(1) made of a rectangle or circular substrate part and a protrusion protruded from the substrate part are constructed from one material. At this time, the top of the protrusion is coated with vapor-phase synthetic diamond. The substrate part is mechanically fixed or fixed by the vacuum suction of a plurality of vacuum adsorption holes(6).

Abstract translation: 目的：提供接合工具，接合台，用于接合工具的头和用于接合台的台部，以便能够在接合工具和接合台处更换头部。 构成：用于安装半导体的焊接工具或接合台由头部（1）和柄部（14）或基座部构成。 接合工具的特征在于，由矩形或圆形基板部分制成的头部（1）和从基板部分突出的突起由一种材料构成。 此时，突起的顶部涂有气相合成金刚石。 基板部分通过多个真空吸附孔（6）的真空抽吸机械固定或固定。

公开(公告)号：KR100024704B1

公开(公告)日：1987-12-23

申请号：KR1019850000260

申请日：1985-01-17

Applicant: 스미토모덴키고교가부시키가이샤

Inventor： 가와우찌히로시 ,  교오도오미찌히사

IPC: C03B37/12

公开(公告)号：KR1019890003706B1

公开(公告)日：1989-09-30

申请号：KR1019850004927

申请日：1985-07-11

Applicant: 스미토모덴키고교가부시키가이샤

Inventor： 이시구로요오이찌 ,  가와우찌히로시 ,  다나까고오따로오 ,  교오도미찌히사

IPC: C03B37/018 ,  C03B20/00

CPC classification number: C03B37/01446 ,  C03B2201/31 ,  Y02P40/57

Abstract: A method for manufacturing a glass preform for use in optical fiber comprises flame hydrolyzing a glass raw material in an oxyhydrogen flame to form fine glass particles of quartz, depositing the particles on a seed member to produce a solid or hollow cylindrical shoot preform which contains GeO2, and heating and sintering the preform, wherein the preform contains 10-80% by weight of GeO2, the sintering atmosphere consists of an inert gas, at least a part of the atmosphere is kept at 1,600-2,000≦̸C, and the preform is introduced at 3-20 mm/min.

Abstract translation: 制造用于光纤的玻璃预制棒的方法包括在氢氧火焰中火焰水解玻璃原料以形成精细的石英玻璃颗粒，将颗粒沉积在种子构件上以产生含有GeO 2的固体或中空圆柱形预制棒 ，并且加热和烧结预成型件，其中预成型体含有10-80重量％的GeO 2，烧结气氛由惰性气体组成，至少一部分气氛保持在1600-2000℃;和预成型件 以3-20mm / min引入。