公开(公告)号：KR101526022B1

公开(公告)日：2015-06-04

申请号：KR1020097025383

申请日：2008-06-03

Applicant: 아토테크더치랜드게엠베하

Inventor： 뒤네바일세바슈티안 ,  클링글하인츠

IPC: B01F11/00 ,  H01L21/00 ,  B05C1/02 ,  B05C3/04

CPC classification number: H01L21/67086 ,  B01F11/0014 ,  B01F11/0082 ,  B01F2215/004 ,  B01F2215/0096 ,  H01L21/67023 ,  H01L21/67057 ,  H05K3/0085 ,  H05K2203/0292 ,  H05K2203/0746 ,  H05K2203/1509 ,  H05K2203/1572

Abstract: 판형생산물 (W) 의표면에걸쳐균일한유동을보장하기위해서, 그안에배치되는판형생산물 (W) 의습식화학처리를위한처리장치 (100) 가제공된다. 이처리장치는적어도하나의패들형유동요소 (155) 를각각포함하는적어도하나의유동부재 (150) 를구비하고, 적어도하나의유동부재 (150) 는판형생산물 (W) 의표면에대향하여배치되고판형생산물 (W) 의표면에대해실질적으로평행하게이동할수 있다.

公开(公告)号：KR1020100017633A

公开(公告)日：2010-02-16

申请号：KR1020097025383

申请日：2008-06-03

Applicant: 아토테크더치랜드게엠베하

Inventor： 뒤네바일세바슈티안 ,  클링글하인츠

IPC: B01F11/00 ,  H01L21/00 ,  B05C1/02 ,  B05C3/04

CPC classification number: H01L21/67086 ,  B01F11/0014 ,  B01F11/0082 ,  B01F2215/004 ,  B01F2215/0096 ,  H01L21/67023 ,  H01L21/67057 ,  H05K3/0085 ,  H05K2203/0292 ,  H05K2203/0746 ,  H05K2203/1509 ,  H05K2203/1572

Abstract: To ensure a uniform flow over the surface of a product W, an apparatus is provided for the wet chemical treatment of the product W that is disposed in the apparatus 100. This apparatus comprises at least one flow member 150 that includes respectively at least one paddle-like flow element 155, wherein at least one flow member 155 is disposed situated opposite the surface of the product W and is moveable substantially parallel to the surface of the product W.

Abstract translation: 为了确保在产品W的表面上的均匀流动，提供了用于对设置在设备100中的产品W进行湿化学处理的设备。该设备包括至少一个流动构件150，其分别包括至少一个桨 类流动元件155，其中至少一个流动构件155设置成与产品W的表面相对并且可基本上平行于产品W的表面移动。