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公开(公告)号：KR102010731B1
公开(公告)日：2019-08-14
申请号：KR1020197006333
申请日：2017-09-14
Applicant: 아토테크더치랜드게엠베하
IPC: H01L21/677 , C23C18/16 , C25D17/00 , C25F7/00 , H01L21/67 , H01L21/683 , H01L21/687 , H01L21/68 , H01L21/02 , H01L21/306
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