公开(公告)号：KR1020090088546A

公开(公告)日：2009-08-20

申请号：KR1020080013894

申请日：2008-02-15

Applicant: 재단법인서울대학교산학협력재단

Inventor： 조동일 ,  김남국 ,  고형호 ,  최병두 ,  이상민 ,  박재홍 ,  최태영

IPC: G01P3/42

CPC classification number: G01P3/52 ,  G01C19/5614 ,  G01C19/5656

Abstract: An angular velocity sensor with improved sensitivity is provided to control a resonant frequency of a detection part and a driving part by using a structure of the teeth of a comb controlling stiffness electrically. In an angular velocity sensor with improved sensitivity, a driving part is composed of an inner mass, an outer mass, and a driving elastic member. A sensing part is comprised of the inner mass and a sensing elastic member, and a structure of the teeth of a comb capable controlling the stiffness electrically is inserted into the driving unit, a sensing unit. The structure of the teeth of a comb has negative stiffness, and an external angular velocity is generated in Y-axis displacement by a coriolis force. The external angular velocity is transmitted to a circuit at the outside through a driving part and a sensing part.

Abstract translation: 提供具有改进的灵敏度的角速度传感器，以通过使用梳状齿的结构来控制检测部分和驱动部分的谐振频率，以控制电机的刚度。 在具有改进的灵敏度的角速度传感器中，驱动部分由内部质量块，外部质量块和驱动弹性构件组成。 感测部件由内部质量体和感测弹性部件组成，并且能够电动控制刚度的梳齿的结构被插入到驱动单元中，即感测单元。 梳齿的结构具有负刚度，并且通过科里奥利力在Y轴位移中产生外部角速度。 外部角速度通过驱动部和感测部传递到外部的电路。