公开(公告)号：KR100817813B1

公开(公告)日：2008-03-31

申请号：KR1020060046517

申请日：2006-05-24

Applicant: 재단법인서울대학교산학협력재단

Inventor： 조동일 ,  최병두 ,  백승준

IPC: H01L21/027

Abstract: 본 발명은 단결정 실리콘 기판 상에 상이한 단차를 갖는 미세 구조물을 형성하는 방법에 관한 것이다. 본 발명에서는 수직 단차를 형성한 후에 습식 식각을 수행하여, 상이한 단차를 갖는 미세 구조물을 바닥면으로부터 부유시켜 형성한다.

公开(公告)号：KR1020090088546A

公开(公告)日：2009-08-20

申请号：KR1020080013894

申请日：2008-02-15

Applicant: 재단법인서울대학교산학협력재단

Inventor： 조동일 ,  김남국 ,  고형호 ,  최병두 ,  이상민 ,  박재홍 ,  최태영

IPC: G01P3/42

CPC classification number: G01P3/52 ,  G01C19/5614 ,  G01C19/5656

Abstract: An angular velocity sensor with improved sensitivity is provided to control a resonant frequency of a detection part and a driving part by using a structure of the teeth of a comb controlling stiffness electrically. In an angular velocity sensor with improved sensitivity, a driving part is composed of an inner mass, an outer mass, and a driving elastic member. A sensing part is comprised of the inner mass and a sensing elastic member, and a structure of the teeth of a comb capable controlling the stiffness electrically is inserted into the driving unit, a sensing unit. The structure of the teeth of a comb has negative stiffness, and an external angular velocity is generated in Y-axis displacement by a coriolis force. The external angular velocity is transmitted to a circuit at the outside through a driving part and a sensing part.

Abstract translation: 提供具有改进的灵敏度的角速度传感器，以通过使用梳状齿的结构来控制检测部分和驱动部分的谐振频率，以控制电机的刚度。 在具有改进的灵敏度的角速度传感器中，驱动部分由内部质量块，外部质量块和驱动弹性构件组成。 感测部件由内部质量体和感测弹性部件组成，并且能够电动控制刚度的梳齿的结构被插入到驱动单元中，即感测单元。 梳齿的结构具有负刚度，并且通过科里奥利力在Y轴位移中产生外部角速度。 外部角速度通过驱动部和感测部传递到外部的电路。

公开(公告)号：KR1020070106358A

公开(公告)日：2007-11-01

申请号：KR1020060046517

申请日：2006-05-24

Applicant: 재단법인서울대학교산학협력재단

Inventor： 조동일 ,  최병두 ,  백승준

IPC: H01L21/027

CPC classification number: H01L21/3086 ,  B81B7/0003 ,  H01L21/30604 ,  H01L21/3088

Abstract: A method of forming a micro structure with vertical step height on a silicon substrate is provided to float the micro structure by forming the vertical step height and subjecting the substrate to wet etching. A first mask layer(120) is formed on a single crystal silicon substrate, and then a second mask layer is formed on the substrate. The substrate is etched by using the first or second mask layer. The mask layer is removed, and the substrate is etched by using the first mask layer to form a trench. A protective layer(140) is formed on a sidewall of the trench. The substrate is further etched by using the first mask and the protective layer as a mask. The substrate is subjected to wet etching to form a cavity on a bottom surface of the trench.

Abstract translation: 提供一种在硅衬底上形成具有垂直台阶高度的微结构的方法，以通过形成垂直台阶高度并使衬底经受湿蚀刻来浮动微结构。 在单晶硅衬底上形成第一掩模层（120），然后在衬底上形成第二掩模层。 通过使用第一或第二掩模层来蚀刻衬底。 去除掩模层，并且通过使用第一掩模层来蚀刻衬底以形成沟槽。 在沟槽的侧壁上形成保护层（140）。 通过使用第一掩模和保护层作为掩模进一步蚀刻衬底。 对衬底进行湿蚀刻以在沟槽的底表面上形成空腔。

公开(公告)号：KR1020060124267A

公开(公告)日：2006-12-05

申请号：KR1020050046096

申请日：2005-05-31

Applicant: 재단법인서울대학교산학협력재단

Inventor： 조동일 ,  박상준 ,  최병두

IPC: G01M1/10

Abstract: A flat type 3-axis inertia measurement system with an exact alignment are provided to simplify a packaging process, increase a yield, and minimize a size of a manufactured inertia sensor. A flat type 3-axis inertia measurement system with an exact alignment includes an x-axis accelerating system(100) for detecting a translation motion of the x-axis, a y-axis accelerating system for detecting a translation motion of the y-axis, and a z-axis accelerating system for detecting a rotation motion of the z-axis.

Abstract translation: 提供了具有精确对准的扁平型3轴惯性测量系统，以简化包装过程，提高产量，并使制造的惯性传感器的尺寸最小化。 具有精确对准的扁平型3轴惯性测量系统包括用于检测x轴的平移运动的x轴加速系统（100），用于检测y轴的平移运动的y轴加速系统 以及用于检测z轴的旋转运动的z轴加速系统。