公开(公告)号：KR1020090016063A

公开(公告)日：2009-02-13

申请号：KR1020070080425

申请日：2007-08-10

Applicant: 재단법인서울대학교산학협력재단 ,  경원산업 주식회사

Inventor： 김현이 ,  이경우 ,  고영학 ,  이승호

IPC: C04B35/491 ,  C04B35/493

CPC classification number: H01L41/43 ,  C04B35/493 ,  C04B35/6264 ,  C04B38/007 ,  C04B38/0605 ,  C04B2235/3249 ,  C04B2235/40 ,  H01L41/1876

Abstract: A manufacturing method of pore electrostrictive ceramics having excellent capacity of hydrostatic pressure is provided to control a porosity easily and to have three dimensions strong structure. A manufacturing method of pore electrostrictive ceramics having excellent capacity of hydrostatic pressure comprises steps of: dispersing the electrostrictive ceramics powder of 5 to 25 vol.% and producing uniform slurry at a temperature over melting point of a solvent; injecting the slurry into a molded unit, solidifying it, subliming the solvent and forming a pore electrostrictive ceramics precursor; and sintering the pore piezoelectricity ceramic precursor and forming the pore electrostrictive ceramics. The electrostrictive ceramics powder is Pb(Zr,Ti)O3.

Abstract translation: 提供具有优异的静水压力的孔电致伸缩陶瓷的制造方法，以容易地控制孔隙并具有三维结构。 具有优异的静水压力的孔电致伸缩陶瓷的制造方法包括以下步骤：将电致伸缩陶瓷粉末分散5-25体积％，并在溶剂的熔点以上的温度下制备均匀的浆料; 将浆料注入模塑单元中，使其固化，升华溶剂并形成孔电致伸缩陶瓷前体; 并烧结孔压电陶瓷前体并形成孔电致伸缩陶瓷。 电致伸缩陶瓷粉末为Pb（Zr，Ti）O3。

公开(公告)号：KR100868321B1

公开(公告)日：2008-11-11

申请号：KR1020060034258

申请日：2006-04-14

Applicant: 재단법인서울대학교산학협력재단

Inventor： 이경우 ,  김기범 ,  박영욱 ,  이태연

IPC: H01L27/115 ,  H01L21/8247

CPC classification number: G11C11/5678 ,  G11C13/0004

Abstract: 본 발명은 하나의 단위 셀 내에서 상변화층이 모두 동일한 선폭을 가져도 각각의 상태를 독립적으로 제어할 수 있는 상변화 메모리 소자의 단위 셀 구조를 제공하기 위한 것으로, 이를 위해 본 발명은 상변화층과, 상기 상변화층과 동일 층 내에서 상기 상변화층과 평행하게 배치된 보조 저항층을 구비하는 상변화 메모리 소자의 단위 셀을 제공한다.
상변화 메모리 소자, 하부전극, 발열체, 상변화 물질, 보조 저항층, 병렬, 결정질상, 비정질상

公开(公告)号：KR1020070091053A

公开(公告)日：2007-09-07

申请号：KR1020050030925

申请日：2005-04-14

Applicant: 재단법인서울대학교산학협력재단 ,  경원산업 주식회사

Inventor： 김현이 ,  이성미 ,  이경우

IPC: C04B35/01 ,  C04B35/491

Abstract: A method for preparing an MnO2 added PZN-PZT composite is provided to obtain a composite for electronic parts having sufficient dielectric and piezoelectric characteristics including an excellent mechanical quality factor. A method for preparing an MnO2 added PZN-PZT composite comprises the steps of: mixing MnO2 powder with PZN and PZT powder; molding the resultant mixed powder; and sintering the molded product at a low temperature of 1000 deg.C or lower. In the method, MnO2 is added in an amount of 0.1-0.6 wt% based on the weight of the PZN-PZT composite free from MnO2. The raw materials, MnO2, PZN and PZT, are used in such a ratio that the resultant xPZN-(1-x)PZT composite has x ranging from 0.1 to 0.6.

Abstract translation: 提供一种制备添加了MnO 2的PZN-PZT复合材料的方法，以获得具有良好机械品质因子的具有足够的电介质和压电特性的电子零件的复合材料。 制备添加有MnO 2的PZN-PZT复合材料的方法包括以下步骤：将MnO 2粉末与PZN和PZT粉末混合; 模制所得混合粉末; 并在1000℃或更低的低温下烧结成型产品。 在该方法中，以不含MnO 2的PZN-PZT复合物的重量计，MnO 2的添加量为0.1-0.6重量％。 使用原料MnO 2，PZN和PZT，使得得到的xPZN-（1-x）PZT复合物的x的范围为0.1至0.6。

公开(公告)号：KR1020040079451A

公开(公告)日：2004-09-16

申请号：KR1020030014204

申请日：2003-03-07

Applicant: 재단법인서울대학교산학협력재단

Inventor： 김기범 ,  강대환 ,  안동호 ,  이경우 ,  정병기

IPC: H01L27/10

Abstract: PURPOSE: A method for fabricating an electrical phase change memory device is provided to perform a phase change process in low operating current by using a heat generation and isolation layer. CONSTITUTION: An active region as a source and a drain and a cell selection transistor are formed on a silicon substrate(20). An interlayer dielectric(23) is deposited thereon. A contact is formed by performing a photoresist process and an etch process. Conductive contact materials(24) such as tungsten and titanium nitride are deposited thereon. A heat generation and isolation layer(25,25-1) is formed on the contact materials. Phase change materials(26,26-1) are deposited on the heat generation and isolation layer. A unit cell memory structure is formed by patterning the heat generation and isolation layer, the phase change materials, and a metal electrode formed on the phase change materials.

Abstract translation: 目的：提供一种用于制造电相变存储器件的方法，通过使用发热和隔离层来执行低工作电流的相变过程。 构成：在硅衬底（20）上形成作为源极的有源区和漏极以及电池选择晶体管。 在其上沉积层间电介质（23）。 通过进行光致抗蚀剂工艺和蚀刻工艺形成接触。 诸如钨和氮化钛的导电接触材料（24）沉积在其上。 在接触材料上形成发热隔离层（25,25-1）。 相变材料（26,26-1）沉积在发热隔离层上。 通过图案化形成在相变材料上的发热隔离层，相变材料和金属电极来形成单元存储结构。

公开(公告)号：KR1020090016240A

公开(公告)日：2009-02-13

申请号：KR1020070080735

申请日：2007-08-10

Applicant: 재단법인서울대학교산학협력재단 ,  경원산업 주식회사

Inventor： 김현이 ,  이경우 ,  이재웅 ,  박치성

IPC: H01L41/18

CPC classification number: H01L41/0973 ,  H01L41/33

Abstract: A free-standing piezoelectric device with excellent properties is provided to form piezoelectric-film which is precise and no cracking by forming the piezoelectric film though electric field formed from the electrode layer. In a free-standing piezoelectric device with excellent properties, a separation layer is formed on the even substrate, and the electrode layer is formed on the separation layer. The separation layer is oxidized and is divided by performing a thermal process. A piezoelectric-film is formed by the electric field formed from the electrode layer, and has the piezoelectric characteristic. Therefore, the substrate is not attached to the piezoelectric film, so the piezoelectric element having excellent a property is manufactured.

Abstract translation: 提供了具有优异特性的独立式压电装置，以形成通过由电极层形成的电场形成压电薄膜而精确且无裂纹的压电薄膜。 在具有优异性能的独立式压电装置中，在均匀基板上形成分离层，在分离层上形成电极层。 分离层被氧化并通过进行热处理而分开。 由电极层形成的电场形成压电膜，具有压电特性。 因此，基板不附着在压电膜上，因此制造出具有优异性能的压电元件。

公开(公告)号：KR1020090016060A

公开(公告)日：2009-02-13

申请号：KR1020070080422

申请日：2007-08-10

Applicant: 재단법인서울대학교산학협력재단 ,  경원산업 주식회사

Inventor： 김현이 ,  이경우 ,  이성미

IPC: H01L41/16 ,  H01L41/18 ,  B06B1/06

CPC classification number: H01L41/1876 ,  C04B35/491 ,  H01L41/0906 ,  H01L41/43

Abstract: A method for manufacturing a spiral piezoelectric actuator using a thermoplastic material and the spiral piezoelectric actuator, and a micromini ultrasonic motor are provided to obtain a sufficient piezoelectric characteristic by performing the sintering using the thermoplastic property after making one feedrod composed of a piezoelectric element and an inert compound and extruding the feedrod through co-extrusion method. The pulverized PZN-PZT powder sintered at low temperature is made by mixing PZN made of Pb, Zn, and Nb and PZT made of Pb, Zn, and (Ti) with a predetermined ratio(S1). A piezoelectric element is made by adding polymer to the PZN-PZT powder(S2). A compound is made by adding the polymer after mixing the PZN-PZT power with Ag(S3). After forming the feedrod with a square pillar of the piezoelectric actuator composed of two-layer plate shape by co-extruding the piezoelectric element and the compound, the feedrod is cut(S4). The feedrod with a predetermined size is processed with a spiral shape in a furnace(S5). The spiral piezoelectric actuator composed of a piezoelectric layer and a compound layer is formed by performing the sintering at high temperature while combusting the polymer by heating the spiral feedrod at high temperature(S6).

Abstract translation: 提供一种制造使用热塑性材料的螺旋压电致动器和螺旋压电致动器的方法以及微型超声波马达，通过在由一个压电元件和一个压电元件构成的一个馈线之后进行使用热塑性的烧结来获得足够的压电特性 惰性化合物，并通过共挤出法挤出进料。 通过将由Pb，Zn和Nb制成的PZN和由Pb，Zn和（Ti）制成的PZT以预定的比例（S1）混合制成在低温下烧结的粉碎的PZN-PZT粉末。 通过向PZN-PZT粉末（S2）中加入聚合物制成压电元件。 通过在将PZN-PZT功率与Ag（S3）混合后添加聚合物来制备化合物。 在通过共挤出压电元件和化合物的方式将由双层板形式构成的压电致动器的方柱形成饲料之后，进料被切割（S4）。 具有预定尺寸的饲料在炉中以螺旋形状加工（S5）。 由压电层和复合层组成的螺旋压电致动器通过在高温下进行烧结而形成，同时通过在高温下加热螺旋进料来燃烧聚合物（S6）。

公开(公告)号：KR1020080000010A

公开(公告)日：2008-01-02

申请号：KR1020060057192

申请日：2006-06-26

Applicant: 재단법인서울대학교산학협력재단 ,  경원산업 주식회사

Inventor： 김현이 ,  이경우 ,  윤창번

IPC: H01L41/083 ,  H01L41/187

CPC classification number: H01L41/083 ,  H01L41/0471 ,  H01L41/187 ,  H01L41/193 ,  H01L41/273

Abstract: A multilayer 2-2 piezo-composite ultrasonic transducer and a manufacturing method thereof are provided to cause a large displacement by a low voltage and to use a wide range of frequency. Two first inner electrode layers are exposed from a left side of a piezoceramic plate and directly contacted with a first outer electrode layer. The first inner electrode layers are not exposed from a right side of the piezoceramic plate but buried under a piezoelectric layer apart from a second outer electrode layer. Two second inner electrode layers are arranged to be opposed to the first inner electrode layers and contacted with the outer electrode layer, which is not contacted with the first inner electrode layers. The first and second inner electrode layers are alternatively arranged in the piezoelectric layers. When electric power is supplied to the outer electrode layers, a voltage is induced between the first and second inner electrode layers.

Abstract translation: 提供多层2-2压电复合超声波换能器及其制造方法，以通过低电压引起大的位移并且使用宽的频率范围。 两个第一内电极层从压电陶瓷板的左侧露出，并与第一外电极层直接接触。 第一内部电极层不从压电陶瓷板的右侧暴露，而是埋在与第二外部电极层隔开的压电层下方。 两个第二内部电极层被布置成与第一内部电极层相对并且与不与第一内部电极层接触的外部电极层接触。 第一和第二内部电极层交替布置在压电层中。 当向外部电极层供电时，在第一和第二内部电极层之间产生电压。

公开(公告)号：KR1020070102295A

公开(公告)日：2007-10-18

申请号：KR1020060034258

申请日：2006-04-14

Applicant: 재단법인서울대학교산학협력재단

Inventor： 이경우 ,  김기범 ,  박영욱 ,  이태연

IPC: H01L27/115 ,  H01L21/8247

CPC classification number: G11C11/5678 ,  G11C13/0004

Abstract: A unit cell of a multi-bit phase changeable memory device is provided to control independently each state of one unit cell according to the phase change of a phase changeable material in spite of the same CDs(Critical Dimensions) of phase changeable layers by forming a parallel structure together with the phase changeable material using a predetermined material with a proper electric resistivity between first resistivity of a crystalline phase of the phase changeable material and a second resistivity of an amorphous phase of the phase changeable material. A unit cell of a phase changeable memory device includes a phase changeable layer(112) and an auxiliary resistive layer. The auxiliary resistive layer(111) is arranged parallel with the phase changeable layer in the same layer as that of the phase changeable layer. A plurality of phase changeable layers and auxiliary resistive layers are capable of being alternately arranged in the same layer. The auxiliary resistive layer has a predetermined resistivity between a first resistivity and a second resistivity. The first resistivity is obtained from the phase changeable layer of a crystalline phase. The second resistivity is acquired from the phase changeable layer of an amorphous phase.

Abstract translation: 提供多位相位可变存储器件的单位单元，用于根据可相变材料的相位变化来独立地控制一个单元电池的每个状态，尽管通过形成相变层可以具有相同的CD（临界尺寸） 使用具有在相变材料的结晶相的第一电阻率和可相变材料的非晶相的第二电阻率之间具有适当电阻率的预定材料的相变材料。 相变存储器件的单元单元包括相变层（112）和辅助电阻层（112）。 辅助电阻层（111）与相变层平行地设置在与相变层相同的层中。 多个相变层和辅助电阻层能够交替布置在同一层中。 辅助电阻层在第一电阻率和第二电阻率之间具有预定的电阻率。 第一电阻率是从结晶相的相变层获得的。 从非晶相的相变层获取第二电阻率。

公开(公告)号：KR100727800B1

公开(公告)日：2007-06-18

申请号：KR1020050065580

申请日：2005-07-20

Applicant: 재단법인서울대학교산학협력재단 ,  경원산업 주식회사

Inventor： 김현이 ,  전신희 ,  윤창번 ,  이경우

IPC: H01L41/333 ,  B29C67/04

Abstract: 동시압출법을 이용한 내부전극이 코팅된 압전 파이버의 제조방법, 내부전극이 단면 반원형상으로 코팅된 압전 파이버 그리고 이것을 포함하는 액츄에이터가 개시된다. 본 발명은 동시압출 및 저온 동시소성을 이용하여 내부전극이 코팅된 압전 파이버를 제조함으로써 낮은 전압에서 횡방향(transverse) 진동모드(d31 진동모드)의 큰 변위를 얻을 수 있고, 특히 단면 반원형 내부전극을 형성함으로써 큰 변위를 갖는 캔틸레버형 액츄에이터에 활용할 수 있다.
동시압출, 동시소성, 동시소결, 압전 파이버, 액츄에이터, 횡방향 진동모드, 내부전극, 캔틸레버

公开(公告)号：KR100714440B1

公开(公告)日：2007-05-04

申请号：KR1020050029616

申请日：2005-04-08

Applicant: 재단법인서울대학교산학협력재단 ,  경원산업 주식회사

Inventor： 김현이 ,  윤창번 ,  이경우

IPC: H02N2/00 ,  H02N2/02

Abstract: 본 발명은 압전 모터에 관한 것으로 보다 상세하게는 동시 사출법(Co-rxtrusion)에 의한 압전 초음파 모터의 제조 방법과 그 방법에 의해 제조된 압전 초음파 모터에 관한 것이다.
본 발명에 따른 압전 초음파 모터의 제조 방법은 저온 소결이 가능한 납(Pb), 아연(Zn), 니오브(Nb)로 조성되는 PZN과 납(Pb), 아연(Zn), 티타늄(Ti)으로 조성되는 PZT가 소정 비율로 혼합된 PZN-PZT 파우더와 폴리머를 혼합하여 압전체를 제조하는 압전체 제조 공정과; 상기 압전체 제조 공정에 의해 제조된 PZN-PZT 파우더와 은(Ag)을 소정 비율로 혼합된 파우더에 폴리머를 혼합하여 복합체를 제조하는 복합체 제조 공정과; 상기 압전체 및 복합체 제조 공정에 의해 제조된 압전체 및 복합체와 카본 블랙을 이용하여 상기 압전 모터의 초기 형상에 따른 피드로드(Feedrod)를 제작하는 피드로드 제작 공정과; 제작된 상기 피드로드(Feedrod)를 소정 크기의 성형 틀을 통해 사출하고 사출된 압전 모터 시편을 소정 크기로 절단하는 사출 공정;을 포함하는 것을 특징으로 한다.
따라서, 서로 다른 소재를 하나의 피드로드(Feedrod)로 제작하고, 제작된 피드로드(Feedrod)를 동시에 사출시켜 압전 초음파 모터를 제조함으로써, 충분한 압전효과를 가질 수 있는 압전체 및 구동력이 우수한 압전 초음파 모터를 적은 비용과 제조할 수 있는 장점이 있다.
압전체, 압전 효과, 압전 모터, PZT, PZN