公开(公告)号：KR101090739B1

公开(公告)日：2011-12-08

申请号：KR1020090037974

申请日：2009-04-30

Applicant: 전자부품연구원

Inventor： 박준식 ,  노봉현 ,  조영창 ,  조남규 ,  이인규 ,  박순섭

IPC: G01N27/12 ,  H01L21/203

Abstract: 반도체기판; 상기반도체기판상에형성되는마이크로히터층; 상기마이크로히터상에형성되는감지전극층; 상기감지전극상부에형성되는감지물질층을포함하고, 상기감지물질층은상기감지전극층상에미리형성된촉매층을이용하여상기감지전극층상에직접성장되어형성되는것을특징으로하는마이크로가스센서및 그제조방법을제공한다.

公开(公告)号：KR1020100119057A

公开(公告)日：2010-11-09

申请号：KR1020090037974

申请日：2009-04-30

Applicant: 전자부품연구원

Inventor： 박준식 ,  노봉현 ,  조영창 ,  조남규 ,  이인규 ,  박순섭

IPC: G01N27/12 ,  H01L21/203

Abstract: PURPOSE: A micro-gas sensor and a manufacturing method thereof, which directly forms various sensing materials on a narrow space for a patterning process, is provided to reduce manufacturing processes by omitting an organic removal process. CONSTITUTION: A micro-gas sensor comprises a semiconductor substrate(100), a micro heater layer, a sensing electrode layer and a sensing material layer. The micro heater layer is formed on the top part of the substrate. The sensing electrode layer is formed on the micro heater. The sensing material layer is formed on the top of the sensing electrode layer. A first insulation layer is formed between the semiconductor substrate and the micro heater layer.

Abstract translation: 目的：提供一种微气体传感器及其制造方法，其在窄空间上直接形成用于图案化工艺的各种感测材料，以通过省略有机去除工艺来减少制造工艺。 构成：微气体传感器包括半导体衬底（100），微加热器层，感测电极层和传感材料层。 微加热器层形成在基板的顶部。 感测电极层形成在微加热器上。 感测材料层形成在感测电极层的顶部。 在半导体衬底和微加热器层之间形成第一绝缘层。