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公开(公告)号：KR100857590B1
公开(公告)日：2008-09-09
申请号：KR1020070014346
申请日：2007-02-12
Applicant: 충남대학교산학협력단
IPC: H01L21/205 , B82Y40/00
CPC classification number: B05D3/00 , C23C16/40 , C23C16/45565 , H05K3/146
Abstract: 본 발명은, (A) 증발기에 의해 증기화된 소스증기를 반응챔버 내에 있는 샤워헤드에서 열분해 되도록 가열하여 나노크기의 단일상(single phase)으로 변환시키는 단계와 (B) 상기 나노크기의 단일상으로 된 소스증기를 반응챔버 내의 별도로 가열되지 않는 연성 폴리머 기판에 증착하는 단계를 포함하는 상온 연성 폴리머 기판위에 화학증착법에 관한 것이다.
증착, 화학증착, 연성 기판, 폴리머 기판, 단일상, 분사장치-
公开(公告)号：KR1020080075330A
公开(公告)日：2008-08-18
申请号：KR1020070014346
申请日：2007-02-12
Applicant: 충남대학교산학협력단
IPC: H01L21/205 , B82Y40/00
CPC classification number: B05D3/00 , C23C16/40 , C23C16/45565 , H05K3/146
Abstract: A chemical vapor deposition method performed on a flexible polymer substrate is provided to deposit a dielectric film on the flexible polymer substrate without heating up the substrate by performing a CVD process at room temperature. A source vapor, which is vaporized by a vaporizer, is heated, such that the source vapor is thermally decomposed in a shower head, which is arranged in a reaction chamber, and the source vapor is turned into a nano-sized single phase material. The nano-sized single phase source vapor is deposited on a flexible polymer substrate, which is not heated in the reaction chamber. The source vapor is a mixture of bismuth and niobium and heated to a temperature between 220 and 270 °C in the shower head. A temperature of the flexible polymer substrate lies between 40 and 60 °C.
Abstract translation: 提供在柔性聚合物基材上进行的化学气相沉积方法，以在柔性聚合物基材上沉积电介质膜，而不通过在室温下进行CVD工艺来加热基板。 被汽化器蒸发的源蒸气被加热，使得源蒸汽在布置在反应室中的喷淋头中热分解，并且源蒸气变成纳米尺寸的单相材料。 纳米尺寸的单相源蒸气沉积在柔性聚合物基底上，其在反应室中不被加热。 源蒸气是铋和铌的混合物，并在淋浴头中加热到220和270℃之间的温度。 柔性聚合物基材的温度为40-60℃。
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