면 방출형 전자원 및 묘화 장치
    2.
    发明公开
    면 방출형 전자원 및 묘화 장치 失效
    表面发射型电子源和绘图装置

    公开(公告)号:KR1020090119778A

    公开(公告)日:2009-11-19

    申请号:KR1020097020219

    申请日:2008-04-23

    Abstract: A surface emission type electron source comprises a planar first electrode, a planar second electrode provided in opposition to the first electrode, an electron passage layer provided between the first electrode and the second electrode, and a power section for applying voltage to the second electrode and the first electrode. In the electron passage layer, a plurality of quantum wires extending in a first direction heading for the second electrode from the first electrode are provided with a predetermined gap therebetween. Electrons are emitted from the surface of the second electrode. The quantum wire is composed of silicon. In the quantum wire, a plurality of portions whose thickness is thin are formed with a predetermined gap therebetween in the first direction.

    Abstract translation: 表面发射型电子源包括平面第一电极,与第一电极相对设置的平面第二电极,设置在第一电极和第二电极之间的电子通过层,以及用于向第二电极施加电压的功率部分, 第一个电极。 在电子通过层中,从第一电极朝第二电极的第一方向延伸的多个量子线在它们之间设置有预定的间隙。 电子从第二电极的表面发射。 量子线由硅组成。 在量子线中,厚度薄的多个部分在第一方向上以规定的间隔形成。

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