公开(公告)号：KR101474331B1

公开(公告)日：2014-12-18

申请号：KR1020120150554

申请日：2012-12-21

Applicant: 한국과학기술연구원

Inventor： 이광렬 ,  김병현 ,  김찬수 ,  김규봉 ,  김승철 ,  이민호

IPC: H01L21/66

CPC classification number: G06F17/5045 ,  G06F17/5009

Abstract: 나노소자설계용가상실험장치및 그방법이개시된다. 나노소자설계를위한가상실험물질을결정하는가상시편결정부; 가상시편결정부에서결정된가상실험물질에하나이상의공정을적용하는가상공정실험부; 및가상공정실험부에서가상실험물질에적용된각각의공정결과를분석하는가상공정분석부를포함하는, 나노소자설계용가상실험장치가개시된다. 가상공정분석부는, 공정결과를하나이상의입자수준을기준으로분석하는다수준분석부를더 포함하는나노소자설계용가상실험장치가개시된다.

公开(公告)号：KR1020140091086A

公开(公告)日：2014-07-21

申请号：KR1020120150554

申请日：2012-12-21

Applicant: 한국과학기술연구원

Inventor： 이광렬 ,  김병현 ,  김찬수 ,  김규봉 ,  김승철 ,  이민호

IPC: H01L21/66

CPC classification number: G06F17/5045 ,  G06F17/5009

Abstract: Disclosed are a multi-dimensional virtual experimental apparatus for designing a nanodevice and a method for the same. The disclosed multi-dimensional virtual experimental apparatus for designing a nanodevice includes a virtual sample determining part for determining a virtual experimental material for designing a nanodevice; a virtual process experimental part for applying at least one process to the virtual experimental material determined by the virtual sample determining part; and a virtual process analyzing part for analyzing each process result applied to the virtual experimental material in the virtual process experimental part. The virtual process analyzing part further includes a multi-level analyzing part for analyzing the process result based on one or more particle levels.

Abstract translation: 公开了一种用于设计纳米器件的多维虚拟实验装置及其方法。 所公开的用于设计纳米器件的多维虚拟实验装置包括用于确定用于设计纳米器件的虚拟实验材料的虚拟样本确定部分; 虚拟处理实验部件，用于将至少一个处理应用于由虚拟样本确定部分确定的虚拟实验材料; 以及用于分析在虚拟处理实验部分中应用于虚拟实验材料的每个处理结果的虚拟过程分析部分。 虚拟过程分析部分还包括用于基于一个或多个粒子水平分析过程结果的多级分析部分。