-
公开(公告)号:KR100582714B1
公开(公告)日:2006-05-23
申请号:KR1020040007270
申请日:2004-02-04
Applicant: 한국과학기술연구원
IPC: B05D1/24
Abstract: 습식 밀링 장치와 슬러리 냉각조로 구성된 순환식 밀링 장치를 기반으로, 실리카 분말과 물을 원료로 사용함으로써, 두 장치 사이의 온도차에 의하여 발생하는 실리카의 용해도차를 이용하여 대부분의 분말 표면에 균일하고 치밀한 실리카 코팅층을 형성할 수 있다. 두 장치 사이의 온도차 이외에도 슬러리 pH를 강산이나 강염기로 조절하거나 미세한 크기의 실리카 분말을 사용함으로써 실리카의 용해도를 증가시켜 실리카 코팅 속도를 증가시킬 수 있고, 공정 중에 실리카 분말을 추가로 첨가함으로써 실리카 코팅층의 두께를 쉽게 증가시킬 수 있다.
밀링, 냉각, 온도, 용해도, 기계화학적, 실리카 코팅, 슬러리 pH, 분말 크기-
公开(公告)号:KR1020030073445A
公开(公告)日:2003-09-19
申请号:KR1020020013003
申请日:2002-03-11
Applicant: 한국과학기술연구원
IPC: B01J2/06
Abstract: PURPOSE: A method for preparing powder granules by liquid condensation process is provided to economically prepare uniform granules without defects, and a method for compacting powder granules by liquid condensation process is provided to freely change compaction density of granules and improve compactibility of powder granules. CONSTITUTION: The method comprises the processes of preparing slurry by mixing powder and binder with solvent(13) soluble for the binder; dropping the slurry into solvent insoluble for the binder, thereby fixing the binder so that the binder is prevented from coming out of the surface of droplets, and causing replacement between the soluble solvent and insoluble solvent inside the droplets on the surface of dropped slurry droplets, thereby condensing the droplets; and completely removing residual solvent by drying the separated droplets after separating condensed droplets from the insoluble solvent. The method for compacting powder granules by liquid condensation process comprises the processes of preparing slurry by mixing powder to be compacted and binder with solvent soluble for the binder; dropping the slurry into solvent insoluble for the binder, thereby fixing the binder so that the binder is prevented from coming out of the surface of droplets, and causing replacement between the soluble solvent and insoluble solvent inside the droplets on the surface of dropped slurry droplets, thereby condensing the droplets; completely removing residual solvent by drying the separated droplets after separating condensed droplets from the insoluble solvent; preparing green compact by pressing the dried granules in mold; and degreasing the binder by heating the green compact.
Abstract translation: 目的:提供一种通过液体缩合方法制备粉末颗粒的方法,以经济地制备无缺陷的均匀颗粒,并提供通过液体冷凝方法压实粉末颗粒的方法,以自由改变颗粒的压实密度并提高粉末颗粒的紧密度。 构成:该方法包括通过将粉末和粘合剂与可溶于粘合剂的溶剂(13)混合来制备浆料的方法; 将浆料滴入不溶于粘合剂的溶剂中,由此固定粘合剂,从而防止粘合剂从液滴的表面流出,并引起可滴落的液滴表面上的液滴内的可溶性溶剂和不溶性溶剂之间的置换, 从而冷凝液滴; 并在从不溶性溶剂中分离出浓缩的液滴后,通过干燥分离的液滴来完全除去残余溶剂。 通过液体冷凝法压粉粉末颗粒的方法包括通过将要压实的粉末和粘合剂与可溶于粘合剂的溶剂混合来制备浆料的方法; 将浆料滴入不溶于粘合剂的溶剂中,由此固定粘合剂,从而防止粘合剂从液滴的表面流出,并引起可滴落的液滴表面上的液滴内的可溶性溶剂和不溶性溶剂之间的置换, 从而冷凝液滴; 在从不溶性溶剂中分离浓缩的液滴后,通过干燥分离出的液滴来完全除去残留溶剂; 通过在模具中挤压干燥的颗粒制备生坯; 并通过加热生坯来去除粘合剂。
-
公开(公告)号:KR1020030063763A
公开(公告)日:2003-07-31
申请号:KR1020020004042
申请日:2002-01-24
Applicant: 한국과학기술연구원
CPC classification number: C09G1/02 , C01P2004/64 , C09K3/1409 , C09K3/1463 , H01L21/3212 , Y10S977/888
Abstract: PURPOSE: A slurry for a tungsten CMP (chemical mechanical polishing) is provided, which shows an excellent dispersion stability of nano-sized ceramic particles in an aqueous solution and a high polishing efficiency. CONSTITUTION: The slurry comprises 5-25 wt% of a polishing agent; 1-5 wt% of an oxidizing agent; 0.4-4 wt% of an oxidation accelerator; and 1-10 wt% of an oxidation acceleration stabilizer, and is stable at pH 3-5. Preferably the polishing agent is 5-10 wt% of nano-sized alumina or 5-25 wt% of nano-sized silica, and has an average particle size of 200 nm or less; the oxidizing agent is hydrogen peroxide; the oxidation accelerator is 0.05-0.5 M Fe(NO3)3; and the oxidation acceleration stabilizer is 1-10 wt% of citric acid, 0.5-5 wt% of malonic acid or 0.6-6 wt% of oxalic acid.
Abstract translation: 目的:提供用于钨CMP(化学机械抛光)的浆料,其显示了纳米级陶瓷颗粒在水溶液中的优异分散稳定性和高抛光效率。 构成:浆料包含5-25重量%的抛光剂; 1-5重量%的氧化剂; 0.4-4重量%的氧化促进剂; 和1-10重量%的氧化加速稳定剂,在pH 3-5时稳定。 抛光剂优选为5-10重量%的纳米尺寸氧化铝或5-25重量%的纳米尺寸二氧化硅,平均粒度为200nm以下; 氧化剂是过氧化氢; 氧化促进剂为0.05〜0.5M Fe(NO 3)3; 氧化加速稳定剂为柠檬酸1-10重量%,丙二酸0.5-5重量%,草酸0.6-6重量%。
-
公开(公告)号:KR100439738B1
公开(公告)日:2004-07-12
申请号:KR1020020013003
申请日:2002-03-11
Applicant: 한국과학기술연구원
IPC: B01J2/06
Abstract: Powder granules are prepared by preparing slurry by mixing powders, binding agent, and binding agent soluble solvent; dropping slurry to binding agent insoluble solvent; coagulating droplet by solvent exchange between the soluble and insoluble solvents; and separating the coagulated droplet from the insoluble solvent. The preparation of powder granules involves preparing slurry by mixing powders, binding agent, and binding agent soluble solvent; dropping slurry to binding agent insoluble solvent to fix the binding agent so that it can not be released to a surface of the droplet of the slurry; coagulating the droplet by solvent exchange between the soluble solvent inside the droplet and the insoluble solvent at the surface of the droplet; and separating the coagulated droplet from the insoluble solvent, drying it, and removing a residual solvent. An independent claim is also included for a method for shaping powder granules by liquid condensation comprising preparing the slurry; dropping the slurry to the binding agent insoluble solvent; coagulating the droplet; separating the coagulated droplet from the insoluble solvent; pressurizing the dried granules in a metal mold to fabricate a shaped body; and removing the binding agent by heating the shaped body.
Abstract translation: 通过混合粉末,粘合剂和粘合剂可溶性溶剂制备浆料来制备粉末颗粒; 将浆液滴入粘合剂不溶溶剂中; 通过可溶性和不溶性溶剂之间的溶剂交换使凝固液凝固; 并将凝结的液滴与不溶性溶剂分离。 粉末颗粒的制备包括通过混合粉末,粘合剂和粘合剂可溶性溶剂来制备浆料; 将浆料滴入粘合剂不溶溶剂中以固定粘合剂,使其不能被释放到浆料液滴的表面; 通过液滴内部的可溶性溶剂与液滴表面处的不溶性溶剂之间的溶剂交换来使液滴凝固; 并将凝结的液滴从不溶性溶剂中分离出来,将其干燥并除去残余溶剂。 还包括一种独立权利要求,用于通过液体冷凝使粉末颗粒成形的方法,包括制备浆料; 将浆料滴入粘合剂不溶溶剂中; 凝结小滴; 将凝结的液滴与不溶性溶剂分离; 在金属模具中加压干燥的颗粒以制造成型体; 并通过加热成形体来去除粘合剂。
-
公开(公告)号:KR1020050079124A
公开(公告)日:2005-08-09
申请号:KR1020040007270
申请日:2004-02-04
Applicant: 한국과학기술연구원
IPC: B05D1/24
Abstract: 습식 밀링 장치와 슬러리 냉각조로 구성된 순환식 밀링 장치를 기반으로, 실리카 분말과 물을 원료로 사용함으로써, 두 장치 사이의 온도차에 의하여 발생하는 실리카의 용해도차를 이용하여 대부분의 분말 표면에 균일하고 치밀한 실리카 코팅층을 형성할 수 있다. 두 장치 사이의 온도차 이외에도 슬러리 pH를 강산이나 강염기로 조절하거나 미세한 크기의 실리카 분말을 사용함으로써 실리카의 용해도를 증가시켜 실리카 코팅 속도를 증가시킬 수 있고, 공정 중에 실리카 분말을 추가로 첨가함으로써 실리카 코팅층의 두께를 쉽게 증가시킬 수 있다.
-
-
-
-