公开(公告)号：KR100655367B1

公开(公告)日：2006-12-08

申请号：KR1020050062344

申请日：2005-07-11

Applicant: 한국과학기술연구원

Inventor： 강종윤 ,  윤석진 ,  김진상 ,  이종흔 ,  조평석 ,  김기원

IPC: G01N37/00

Abstract: A multi-olfactory sensor using LTCC(Low Temperature Co-fired Ceramic) and a manufacturing method are provided to effectively detect the compound chemical amount and to produce the multi-olfactory sensors at low cost by pattern recognition. The multi-olfactory sensor using LTCC comprises plural unit olfactory sensors. The unit olfactory sensor is composed of a first dense LTCC layer; a heater(50) formed on the first dense LTCC layer; a second dense LTCC layer formed on the first dense LTCC layer and the heater; an electrode pattern(60) formed on the second dense LTCC layer; a third dense LTCC layer disposed on the second dense LTCC layer and the electrode pattern; a pair of sensitive electrodes(80) arranged on the third dense LTCC layer; a connecting electrode(70) connecting the electrode pattern and a pair of sensitive electrodes; a fourth dense LTCC layer(40) formed on the third dense LTCC layer and provided with an opening exposing the sensitive electrodes; and a sensitive material part formed on the third dense LTCC layer in the opening to come into contact with a pair of sensitive electrodes. The sensitive material part is formed by loading sensitive materials(90) changing a resistance value between the sensitive electrodes according to external chemical materials, to the sensitive electrodes and drying the sensitive materials.

Abstract translation: 提供使用LTCC（低温共烧陶瓷）的多嗅觉传感器和制造方法，以有效检测化合物的化学量并通过模式识别以低成本生产多嗅觉传感器。 使用LTCC的多嗅觉传感器包括多个单元嗅觉传感器。 单元嗅觉传感器由第一密集LTCC层组成; 形成在第一致密LTCC层上的加热器（50） 在第一致密LTCC层和加热器上形成的第二致密LTCC层; 在第二致密LTCC层上形成的电极图案（60） 设置在所述第二致密LTCC层和所述电极图案上的第三致密LTCC层; 布置在第三致密LTCC层上的一对敏感电极（80） 连接电极图案和一对敏感电极的连接电极（70） 形成在所述第三致密LTCC层上并且设置有暴露所述敏感电极的开口的第四致密LTCC层（40） 以及在开口中的第三致密LTCC层上形成的敏感材料部分，以与一对敏感电极接触。 敏感材料部分是通过加载敏感材料（90）来形成的，敏感材料（90）根据外部化学材料改变敏感电极之间的电阻值，敏感电极和干燥敏感材料。