公开(公告)号：KR100115475B1

公开(公告)日：1997-05-21

申请号：KR1019930006540

申请日：1993-04-19

Applicant: 한국과학기술연구원

Inventor： 정형진 ,  유광수 ,  최두진 ,  정종학

IPC: G01K7/16

公开(公告)号：KR1019940024417A

公开(公告)日：1994-11-18

申请号：KR1019930006540

申请日：1993-04-19

Applicant: 한국과학기술연구원

Inventor： 정형진 ,  유광수 ,  최두진 ,  정종학

IPC: G01K7/16

公开(公告)号：KR1019970001965B1

公开(公告)日：1997-02-20

申请号：KR1019930006540

申请日：1993-04-19

Applicant: 한국과학기술연구원

Inventor： 정형진 ,  유광수 ,  최두진 ,  정종학

IPC: G01K7/16

Abstract: A process for manufacturing a thin film platinum temperature sensor capable of removing platinum remaining at a boundary after laser trimming is disclosed. In the process, a surface of an alumina substrate is cleaned and dried. Platinum is deposited on the alumina substrate in the form of a thin film. The thin film of platinum is heat-treated. An active photosensitive material is spin-coated on the heat-treated thin film of platinum, soft-baked, exposed to helium light, photoprinted, and then hard-baked. The heat-treated thin film of platinum is chemically etched by using an etching solution so that a serpentine type pattern is formed on the thin film of the platinum. A leading wire is connected to both terminals of the formed pattern. The formed pattern is coated by means of a protective film or sealed in a glass or metal pipe.

Abstract translation: 公开了一种能够去除在激光修整之后边界残留的铂的薄膜铂温度传感器的制造方法。 在此过程中，清洁和干燥氧化铝基板的表面。 铂以薄膜的形式沉积在氧化铝衬底上。 铂的薄膜被热处理。 将活性感光材料旋涂在热处理的铂薄膜上，软化，暴露于氦光，照相印刷，然后硬烘烤。 通过使用蚀刻溶液化学蚀刻热处理的铂薄膜，使得在铂的薄膜上形成蛇形型图案。 导线连接到形成图案的两个端子。 形成的图案通过保护膜涂覆或密封在玻璃或金属管中。