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公开(公告)号：KR102102851B1
公开(公告)日：2020-04-22
申请号：KR1020180009127
申请日：2018-01-25
Applicant: 한국과학기술원
IPC: H01L21/02 , H01L21/56 , B23K26/362 , H01L21/311
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