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公开(公告)号：KR101227109B1
公开(公告)日：2013-01-28
申请号：KR1020110035312
申请日：2011-04-15
Applicant: 한국과학기술원
Abstract: 본 발명은 윤활성 유기분자층과 나노 입자의 복합체를 이용하여 마이크로단위 소자(MEMS; micro electro mechanical systems) 또는 나노단위 소자(NEMS; nano electro mechanical systems)의 작동효율을 향상시키는 방법에 관한 것으로서, 마이크로단위 소자 또는 나노단위 소자 표면의 마찰력 및 점착력을 제어함으로써 소자의 작동효율을 향상시킬 수 있다는 유리한 효과가 있다.
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公开(公告)号：KR1020140096868A
公开(公告)日：2014-08-06
申请号：KR1020130010009
申请日：2013-01-29
Applicant: 한국과학기술원
IPC: H01L27/115 , H01L21/8247
CPC classification number: H01L45/04 , B82Y10/00 , H01L45/085 , H01L45/146
Abstract: The present invention relates to a resistance random access memory device and a method for manufacturing the same. More particularly, the present invention provides a resistance random access memory device which includes a lower electrode; an oxide layer which is located on the lower electrode; and an upper electrode which is located on the oxide layer and is formed with a graphene layer, and a method for manufacturing the same using a self alignment process. A resistance random access memory device and a method for manufacturing the same according to the present invention, have an excellent resistance switching property by using graphene and are used in the manufacture of a nano-scaled memory device due to a self alignment process.
Abstract translation: 电阻随机存取存储器件及其制造方法技术领域本发明涉及一种电阻随机存取存储器件及其制造方法。 更具体地，本发明提供一种电阻随机存取存储器件，其包括下电极; 位于下电极上的氧化物层; 以及位于氧化物层上并形成有石墨烯层的上部电极及其制造方法。 根据本发明的电阻随机存取存储器件及其制造方法通过使用石墨烯具有优异的电阻切换特性，并且由于自对准工艺而用于制造纳米级存储器件。
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公开(公告)号：KR1020120117515A
公开(公告)日：2012-10-24
申请号：KR1020110035312
申请日：2011-04-15
Applicant: 한국과학기술원
CPC classification number: B81B7/008 , B81B7/02 , B81B2201/05 , C08J7/04
Abstract: PURPOSE: A frictional force and adhesive force control of a nanometer-scale through an engineered control of an organic molecular layer above nano particles is provided to control a frictional force and adhesive force of a surface of a MEMS or a NEMS by using an organic molecular layer and nano particles, thereby improving the operation efficiency of systems. CONSTITUTION: A method for enhancing the operation efficiency of systems is as follows. The operation efficiency of a MEMS or NEMS is enhanced by using a composite of a lubricative organic molecular layer and nano particles. The frictional force and adhesive force of a surface of a MEMS or NEMS is controlled so that the operation efficiency is improved.
Abstract translation: 目的：提供通过纳米颗粒上方的有机分子层的工程控制的纳米级的摩擦力和粘合力控制，以通过使用有机分子来控制MEMS或NEMS的表面的摩擦力和粘合力 层和纳米颗粒，从而提高系统的运行效率。 构成：提高系统运行效率的方法如下。 通过使用润滑有机分子层和纳米颗粒的复合材料，可以提高MEMS或NEMS的运行效率。 控制MEMS或NEMS的表面的摩擦力和粘合力，从而提高操作效率。
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