公开(公告)号：KR100426959B1

公开(公告)日：2004-04-13

申请号：KR1020020017153

申请日：2002-03-28

Applicant: 한국과학기술원

Inventor： 배병수 ,  정지인 ,  박언호 ,  강은석

IPC: G02B6/02

Abstract: PURPOSE: A method for manufacturing a plate optical waveguide is provided to be capable of simplifying manufacturing processes and reducing the light loss of the plate optical waveguide. CONSTITUTION: After forming a lower clad layer(2) on a substrate(1), an optical waveguide(3) is deposited at the upper portion of the lower clad layer, wherein the optical waveguide includes an inorganic-organic hybrid matrix homogeneously doped with photosensitive photochemistry monomers. An exposure process is carried out at the predetermined portion of the optical waveguide for fixing the photochemistry monomers. After removing the unexposed portion of the photochemistry monomers, a heat treatment is carried out at the optical waveguide for hardening the optical waveguide. Then, an upper clad layer(6) is formed at the upper portion of the resultant structure.

Abstract translation: 目的：提供一种用于制造板光波导的方法，其能够简化制造工艺并减少板光波导的光损失。 组成：在基板上形成的下部包层（2）（1），光学波导（3）之后被沉积在所述下包层，其中，所述光学波导包括均匀掺杂有无机 - 有机杂化基体的上部 光敏光化学单体。 在光波导的预定部分进行曝光处理以固定光化学单体。 除去光化学单体的未曝光部分之后，在光波导上进行热处理以硬化光波导。 然后，在所得结构的上部形成上部包层（6）。

公开(公告)号：KR1020030078247A

公开(公告)日：2003-10-08

申请号：KR1020020017153

申请日：2002-03-28

Applicant: 한국과학기술원

Inventor： 배병수 ,  정지인 ,  박언호 ,  강은석

IPC: G02B6/02

Abstract: PURPOSE: A method for manufacturing a plate optical waveguide is provided to be capable of simplifying manufacturing processes and reducing the light loss of the plate optical waveguide. CONSTITUTION: After forming a lower clad layer(2) on a substrate(1), an optical waveguide(3) is deposited at the upper portion of the lower clad layer, wherein the optical waveguide includes an inorganic-organic hybrid matrix homogeneously doped with photosensitive photochemistry monomers. An exposure process is carried out at the predetermined portion of the optical waveguide for fixing the photochemistry monomers. After removing the unexposed portion of the photochemistry monomers, a heat treatment is carried out at the optical waveguide for hardening the optical waveguide. Then, an upper clad layer(6) is formed at the upper portion of the resultant structure.

Abstract translation: 目的：制造板光波导的方法能够简化制造工艺并降低板光波导的光损失。 构成：在基板（1）上形成下包层（2）之后，在下包层的上部沉积光波导（3），其中光波导包括均匀掺杂有 光敏光化学单体。 在用于固定光化学单体的光波导的预定部分进行曝光处理。 在去除光致化学单体的未曝光部分之后，在光波导下进行热处理以硬化光波导。 然后，在所得结构的上部形成上覆层（6）。