公开(公告)号：KR101384921B1

公开(公告)日：2014-04-17

申请号：KR1020120155410

申请日：2012-12-27

Applicant: 한국기술교육대학교 산학협력단

Inventor： 정광훈 ,  이재혁 ,  최호균 ,  임성한 ,  박철규

IPC: G01N21/88 ,  H01L21/66

CPC classification number: G01N21/956 ,  G01N21/8806 ,  G01N21/8851 ,  G01N2021/9513

Abstract: The present invention relates to a panel inspecting apparatus capable of inspecting an object to be inspected. The apparatus includes a depth measuring unit measuring the depth of a defect formed in the object to be inspected; a control unit measuring the surface area of the object to be inspected, and dividing the measured area into at least one divided region; a Y-direction moving unit moving in the Y direction; an X-direction moving unit moving in the X-direction; and an image pick-up unit sequentially taking a picture of the at least one divided region to output the image to the control unit. The control unit calculates the current defect generated area by use of the image for the current divided region currently taken by the image pick-up unit, calculates the final defect generated area by adding the current defect generated area to the previous defect generated area calculated by the image for the previous divided region previously taken, determines the object to be inspected as a defect state if the final defect generated area is equal to or more than the set area, and determines the object to be inspected as the defect state if the final defect generated area is less than the set area and if the maximum depth among the depth of the defect generated in the current divided region measured by the depth measuring unit is larger than the set depth. [Reference numerals] (11) Photographing unit; (13) Code read unit; (15) Mounting table detecting unit; (17) Death measuring unit; (20) Control unit; (31) X-direction moving unit; (33) Y-directing moving unit; (35) Lighting unit; (37) Display unit

Abstract translation: 本发明涉及能够检查被检查物体的面板检查装置。 该装置包括：测量在待检查物体中形成的缺陷的深度的深度测量单元; 测量被检查物体的表面积的控制单元，将测定面积划分为至少一个分割区域; Y方向移动单元，沿Y方向移动; 沿X方向移动的X方向移动单元; 以及顺序拍摄所述至少一个分割区域的图像以将图像输出到所述控制单元的图像拾取单元。 控制单元通过使用图像拾取单元当前划分的当前分割区域的图像来计算当前缺陷产生区域，通过将当前缺陷生成区域与当前缺陷生成区域相加，计算出最终缺陷生成区域 如果最终缺陷产生区域等于或大于设定区域，则先前取出的先前分割区域的图像，如果最终的缺陷生成区域等于或大于设定区域，则将被检查对象确定为缺陷状态， 缺陷产生区域小于设定区域，并且如果由深度测量单元测量的当前划分区域中产生的缺陷深度之间的最大深度大于设定深度。 （附图标记）（11）拍摄单元; （13）代码读取单元; （15）安装台检测单元; （17）死亡测量单位; （20）控制单元; （31）X方向移动单元; （33）Y导向移动单元; （35）照明单元; （37）显示单元