위상천이 영사식 모아레시스템에서의 측정오차보상방법
    2.
    发明公开
    위상천이 영사식 모아레시스템에서의 측정오차보상방법 失效
    在相移项目中补偿测量误差的方法

    公开(公告)号:KR1020010002383A

    公开(公告)日:2001-01-15

    申请号:KR1019990022152

    申请日:1999-06-15

    Abstract: PURPOSE: A method for compensating measurement error in phase-shifting project moire is provided to improve the accuracy of the three dimensional shape measurement of the whole system by compensating phase distortion error of the phase-shifting project moire. CONSTITUTION: A method for compensating measurement error in phase-shifting project moire includes the steps of obtaining a wavelength become longer than the original wavelength by generating beat phenomenon of the two wavelengths having similar characteristic value, calculating order of moire pattern by using the long wavelength generated by the beat, obtaining two equivalent wavelengths by using two grids having different pitch, extracting order of moire pattern phase about height of a measuring point(28) based on the short equivalent wavelength, and calculating the height of the measuring point from the extracted order.

    Abstract translation: 目的:提供一种补偿相移项目云纹测量误差的方法,通过补偿相移项目云纹的相位失真误差,提高整个系统三维形状测量的精度。 构成:用于补偿相移项目云纹测量误差的方法包括通过产生具有相似特征值的两个波长的拍子现象来获得波长变得比原始波长长的步骤,通过使用长波长计算莫尔图案的顺序 通过使用具有不同间距的两个栅格获得两个等效的波长,基于短等效波长提取关于测量点(28)的高度的莫尔图案相位的次序,并且从提取的测量点计算测量点的高度 订购。

    위상천이 영사식 모아레시스템에서의 측정오차보상방법
    3.
    发明授权
    위상천이 영사식 모아레시스템에서의 측정오차보상방법 失效
    위상천이영사식모레레스템서의측정오차보상방법

    公开(公告)号:KR100369941B1

    公开(公告)日:2003-01-30

    申请号:KR1019990022152

    申请日:1999-06-15

    Abstract: PURPOSE: A method for compensating measurement error in phase-shifting project moire is provided to improve the accuracy of the three dimensional shape measurement of the whole system by compensating phase distortion error of the phase-shifting project moire. CONSTITUTION: A method for compensating measurement error in phase-shifting project moire includes the steps of obtaining a wavelength become longer than the original wavelength by generating beat phenomenon of the two wavelengths having similar characteristic value, calculating order of moire pattern by using the long wavelength generated by the beat, obtaining two equivalent wavelengths by using two grids having different pitch, extracting order of moire pattern phase about height of a measuring point(28) based on the short equivalent wavelength, and calculating the height of the measuring point from the extracted order.

    Abstract translation: 目的:通过补偿移相项目莫尔相位失真误差,提出了一种补偿移相项目莫尔测量误差的方法,以提高整个系统三维形状测量的准确性。 本发明公开了一种补偿相移项目莫尔测量误差的方法,包括以下步骤:通过产生具有相似特征值的两个波长的跳动现象,获得波长变得比原始波长更长的波长,通过使用长波长 通过使用具有不同间距的两个网格获得两个等效波长,基于短等效波长提取关于测量点(28)的高度的莫尔图案相位的次序,并且从提取的图像中计算测量点的高度 订购。

    위상천이격자를 이용한 영사식 모아레법 및 시스템
    4.
    发明授权
    위상천이격자를 이용한 영사식 모아레법 및 시스템 失效
    相移图像投影胶卷和系统

    公开(公告)号:KR100269267B1

    公开(公告)日:2000-10-16

    申请号:KR1019970072162

    申请日:1997-12-23

    Abstract: PURPOSE: A method for projection type moire using a phase transition grating and a system for the same are provided to improve measuring resolvability by applying a phase transition method to a projection type moire. CONSTITUTION: A projection grating(30) and a reference grating(31) are used as one couple. A relative distance between the projection grating(30) and the reference grating(31) is set up. Gratings of n couples are formed on one quartz glass by using a semiconductor lithography method. A phase transition grating(40) is manufactured by forming grating of n couples. The phase transition is obtained by using the phase transition grating(40).

    Abstract translation: 目的:提供一种使用相变光栅的投射型莫尔条纹及其系统,以通过将相变法应用于投射型波纹来提高测量可分辨性。 构成:使用投影光栅(30)和参考光栅(31)作为一对。 设置投影光栅(30)和参考光栅(31)之间的相对距离。 通过使用半导体光刻方法,在一个石英玻璃上形成n个对的格栅。 通过形成n对的光栅来制造相变光栅(40)。 通过使用相变光栅(40)获得相变。

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