公开(公告)号：KR1020030097114A

公开(公告)日：2003-12-31

申请号：KR1020020034282

申请日：2002-06-19

Applicant: 한국전자통신연구원

Inventor： 곽창수 ,  임을균 ,  김대용 ,  손영수

IPC: H01L21/027

Abstract: PURPOSE: A mask align apparatus of vertical exposure equipment is provided to more easily transfer a substrate due to a decrease of weight and volume of a substrate transfer apparatus by aligning a mask in directions of X, Y, Z, theta X, theta Y and theta Z. CONSTITUTION: A Z-direction guide rail(101) is installed in a horizontal base. A Z-direction transfer unit is coupled to the Z-direction guide rail, capable of gliding. A Y-direction align unit(200) is installed in the Z-direction transfer unit. A frame box(300) is composed of an upper plate, a lower plate and both sidewalls, mounted on the Y-direction align unit. Each tilt direction align unit(500) is installed in the upper and lower portions of a main frame(301) connected between the upper and lower plates of the frame box. Each X-direction straight line operating unit(402) is installed in the upper and lower plates of the frame box. A frame hanger(503b) is installed in the upper end of an align frame(302) connected between the X-direction straight line operating units. The upper and lower portions of the rear surface of a mask mounting frame(303) hung on the frame hanger come in contact with the tilt direction align unit protruding through the align frame. A mask frame(304) supports the mask(100), fixed to the front surface of the mask mounting frame.

Abstract translation: 目的：提供垂直曝光设备的掩模对准设备，以便通过在X，Y，Z，θX，θY和Y的方向上对准掩模，由于基板传送设备的重量和体积的减小而更容易地传送基板 θZ.构成：Z方向导轨（101）安装在水平底座中。 Z方向传送单元与Z方向导轨连接，能够滑行。 Y方向对齐单元（200）安装在Z方向传送单元中。 框架盒（300）由安装在Y方向对齐单元上的上板，下板和两个侧壁组成。 每个倾斜方向对准单元（500）安装在连接在框架框的上板和下板之间的主框架（301）的上部和下部。 每个X方向直线操作单元（402）安装在框架框的上板和下板中。 框架悬挂器（503b）安装在连接在X方向直线操作单元之间的对准框架（302）的上端。 悬挂在框架挂钩上的掩模安装框架303的后表面的上部和下部与通过对准框突出的倾斜方向对准单元接触。 掩模框架（304）支撑固定到掩模安装框架的前表面的掩模（100）。

公开(公告)号：KR100432784B1

公开(公告)日：2004-05-24

申请号：KR1020020034282

申请日：2002-06-19

Applicant: 한국전자통신연구원

Inventor： 곽창수 ,  임을균 ,  김대용 ,  손영수

IPC: H01L21/027

Abstract: PURPOSE: A mask align apparatus of vertical exposure equipment is provided to more easily transfer a substrate due to a decrease of weight and volume of a substrate transfer apparatus by aligning a mask in directions of X, Y, Z, theta X, theta Y and theta Z. CONSTITUTION: A Z-direction guide rail(101) is installed in a horizontal base. A Z-direction transfer unit is coupled to the Z-direction guide rail, capable of gliding. A Y-direction align unit(200) is installed in the Z-direction transfer unit. A frame box(300) is composed of an upper plate, a lower plate and both sidewalls, mounted on the Y-direction align unit. Each tilt direction align unit(500) is installed in the upper and lower portions of a main frame(301) connected between the upper and lower plates of the frame box. Each X-direction straight line operating unit(402) is installed in the upper and lower plates of the frame box. A frame hanger(503b) is installed in the upper end of an align frame(302) connected between the X-direction straight line operating units. The upper and lower portions of the rear surface of a mask mounting frame(303) hung on the frame hanger come in contact with the tilt direction align unit protruding through the align frame. A mask frame(304) supports the mask(100), fixed to the front surface of the mask mounting frame.

Abstract translation: 目的：提供垂直曝光设备的掩模对准装置，以通过沿X，Y，Z，θX，θY和θ方向对准掩模，由于基板传送装置的重量和体积的减小而更容易地转移基板 θZ.构成：Z方向导轨（101）安装在水平底座上。 Z方向传送单元联接到Z方向导轨，能够滑动。 Y方向对齐单元（200）安装在Z方向传送单元中。 框架箱（300）由安装在Y方向对准单元上的上板，下板和两个侧壁组成。 每个倾斜方向对齐单元（500）安装在连接在框架箱的上板和下板之间的主框架（301）的上部和下部。 每个X方向直线操作单元（402）安装在框架箱的上下板中。 框架吊架（503b）安装在连接在X方向直线操作单元之间的对齐框架（302）的上端。 悬挂在框架悬挂器上的掩模安装框架（303）的后表面的上部和下部与穿过对齐框架突出的倾斜方向对齐单元接触。 面罩框架（304）支撑固定到面罩安装框架的前表面的面罩（100）。