公开(公告)号：KR100337642B1

公开(公告)日：2002-05-23

申请号：KR1019990027011

申请日：1999-07-06

Applicant: 한국전자통신연구원

Inventor： 한석길 ,  강광용 ,  정상돈 ,  피터맨해롤드

IPC: H01S5/30

CPC classification number: G01Q60/22

Abstract: 본발명은근접장탐침을이용한광혼합밀리미터파생성장치에관한것이다. 원리는제 1 및제 2 레이저에서나온레이저광을레이저빔 결합기를이용하여탐침직경이 0.05 내지 0.1㎛인근접장광혼합용광섬유탐침에주입한후, 탐침에서출력된레이저빔이주변으로산란되지않도록초고속반도체소자와광섬유간의거리를줄일수 있다. 또한, 레이저빔의직경이 0.1㎛정도이므로, 초고속반도체소자가최고로우수한특성영역을찾고, 두레이저광의파장차이에해당하는밀리미터파를생성하므로써, 밀리미터파신호의해상도및 잡음지수를개선할수 있는근접장탐침을이용한광혼합밀리미터파생성장치가개시된다.

公开(公告)号：KR1020010008923A

公开(公告)日：2001-02-05

申请号：KR1019990027011

申请日：1999-07-06

Applicant: 한국전자통신연구원

Inventor： 한석길 ,  강광용 ,  정상돈 ,  피터맨해롤드

IPC: H01S5/30

CPC classification number: G01Q60/22

Abstract: PURPOSE: An apparatus for producing an optical heterodyne millimetric wave using a near-field probe is provided to improve the resolution of the heterodyne light and, to improve the noise factor. CONSTITUTION: An apparatus for producing an optical heterodyne millimetric wave using a near-field probe is used to measure the property of a micro device. A feedback controller(101) designate a reference point for adjusting a distance between an optical fiber probe for near-field optical heterodyne and a property measurement device(106). A photo-diode(107) senses a laser beam of a HeNe-laser(111) for adjusting the distance. The property of the micro device is accurately measured by connecting an electrode contact area of the property measurement device to a micro probe(110) for applying a DC voltage to the electrode. A laser beam coupler(113) couples two laser beams of different frequency of a fist laser(112A) and a second laser(112B). The coupled laser beam is injected to the optical fiber probe. Also, the laser beam coupler mixes a millimetric signal with an output signal of a local oscillator(109). A spectrum analyzer(104) measures an intermediate frequency conversion signal of the mixed signal, and a semiconductor parameter analyzer(105) measures a parameter of the millimetric signal produced by the light of the optical fiber.

Abstract translation: 目的：提供一种使用近场探针产生光学外差毫米波的装置，以提高外差光的分辨率，并提高噪声系数。 构成：使用近场探针制造光学外差毫米波的装置用于测量微器件的性质。 反馈控制器（101）表示用于调整用于近场光学外差的光纤探针与属性测量装置（106）之间的距离的参考点。 光电二极管（107）感测用于调整距离的HeNe激光器（111）的激光束。 通过将性能测量装置的电极接触面连接到用于向电极施加直流电压的微型探针（110）来精确测量微器件的性质。 激光束耦合器（113）耦合第一激光器（112A）和第二激光器（112B）的不同频率的两个激光束。 将耦合的激光束注入到光纤探针中。 此外，激光束耦合器将毫米信号与本地振荡器（109）的输出信号混合。 频谱分析器（104）测量混合信号的中频变换信号，半导体参数分析仪（105）测量由光纤产生的毫米信号的参数。