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公开(公告)号：KR1020130057055A
公开(公告)日：2013-05-31
申请号：KR1020110122787
申请日：2011-11-23
Applicant: 한국표준과학연구원
Abstract: PURPOSE: A device with a baffle for analyzing a particle and a by-product generated in a vacuum process is provided to easily analyze by accurately measuring the intensity of beams caused by fraction and scattering, thereby improving the efficiency and the reliability of an analysis. CONSTITUTION: A device with a baffle(80) for analyzing a particle and a by-product generated in a vacuum process comprises an exhaust pipe(11), a body(20), an incident window(30), a projecting window(40), an optical beam generator(50), and a detector(60). The particle and the by-product generated inside a vacuum chamber are exhausted to the inside of the exhaust pipe. The body coupled with the exhaust pipe forms a predetermined portion of the exhaust pipe and includes a first hollow unit and second hollow unit in which a predetermined portion of the circumference is hollow. Beams are incident into the inside of the incident window through the first hollow unit. Beams are refracted or scattered by the particle and by-product. The refracted or scattered beams are projected to the outside of the projecting window through the second hollow unit. The optical beam generator makes beams incident into the incident window. The detector detects the beams has incident into the inside of the exhaust pipe by the optical beam generator and projected.
Abstract translation: 目的：提供一种用于分析真空过程中产生的颗粒和副产物的挡板的装置，以通过精确测量由分数和散射引起的光束的强度来容易地分析，从而提高分析的效率和可靠性。 构成：具有用于分析真空过程中产生的颗粒和副产物的挡板（80）的装置包括排气管（11），主体（20），入射窗（30），投影窗（40） ），光束发生器（50）和检测器（60）。 在真空室内产生的颗粒和副产物排出到排气管的内部。 与排气管结合的本体形成排气管的预定部分，并且包括第一中空单元和第二中空单元，其中圆周的预定部分是中空的。 光束通过第一个中空单元入射到入射窗的内部。 光束被颗粒和副产物折射或分散。 折射或散射的光束通过第二中空单元投影到投影窗的外部。 光束发生器使光束入射到入射窗中。 检测器检测到光束通过光束发生器入射到排气管的内部并被投影。
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