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公开(公告)号:KR1020090025007A
公开(公告)日:2009-03-10
申请号:KR1020070090027
申请日:2007-09-05
Applicant: 현대자동차주식회사
Abstract: A comb engine oil deterioration detection sensor using a photosensitive polymer and a manufacturing method thereof are provided to improve heat resistance and chemical resistance characteristic by forming a sensor detection film with a photosensitive polymer. A manufacturing method of a comb engine oil deterioration detection sensor using a photosensitive polymer comprises: a step of coating a photoresist layer in a chrome layer on a glass substrates(11); a step of exposing the photoresist layer to an ultraviolet ray; a step of developing the photoresist layer exposed to the ultraviolet ray and forming electrodes(12) by etching the chrome layer; a step of completing the electrodes by removing the photoresist layer; a step of coating a synthesized material(13) of photosensitive polymer and carbon nanotube in the electrode; a step of exposing the synthesized material to the ultraviolet ray; and a step of developing the synthesized material of the carbon nanotube and the photosensitive polymer exposed to the ultraviolet ray and rinsing the synthesized material.
Abstract translation: 提供使用光敏聚合物的梳齿机油劣化检测传感器及其制造方法,通过用感光性聚合物形成传感器检测膜来提高耐热性和耐化学性。 使用感光性聚合物的梳齿机油劣化检测传感器的制造方法包括:在玻璃基板(11)上的铬层中涂布光致抗蚀剂层的工序; 将光致抗蚀剂层暴露于紫外线的步骤; 显影暴露于紫外线的光致抗蚀剂层并通过蚀刻铬层形成电极(12)的步骤; 通过去除光致抗蚀剂层来完成电极的步骤; 在电极中涂布光敏聚合物和碳纳米管的合成材料(13)的步骤; 将合成材料暴露于紫外线的步骤; 以及显影碳纳米管和暴露于紫外线的感光性聚合物的合成材料并漂洗合成材料的步骤。