公开(公告)号：WO2013056059A3

公开(公告)日：2014-06-19

申请号：PCT/US2012059967

申请日：2012-10-12

Applicant: 1366 TECHNOLOGIES INC

Inventor： DANNER GUY M ,  GATES HOLLY G ,  TARASOV VLADIMIR S ,  KANE PETER E ,  MADDEN PETER G ,  SACHS EMANUEL M

IPC: C23C18/14

CPC classification number: B05B5/001 ,  B05B5/005 ,  B05B5/087 ,  B05B7/0012 ,  B05B13/02 ,  B05B15/04 ,  B05D1/04 ,  B05D1/06 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/6715 ,  H01L21/6776

Abstract: A thin polymer film is formed on a substrate. An apparatus is described for transforming a solid polymer resist into an aerosol of small particles, electrostatically charging and depositing the particles onto a substrate, and flowing the particles into a continuous layer. An apparatus is further described for transforming solid resist into an aerosol of small particles by heating the resist to form a low viscosity liquid; the liquid being suitable for jet or impact nebulization and aerosol particle sizing to form the aerosol. A method is further described of using ionized gas to confer charge onto the aerosol particles and using a progression of charging devices, establish an electric field directing the flow of charged particles to the substrate. The progression of charging devices and associated apparatus results in high collection efficiency for the aerosol particles.

Abstract translation: 在基板上形成薄的聚合物膜。 描述了一种用于将固体聚合物抗蚀剂转化成小颗粒气溶胶的装置，将颗粒静电充电并沉积到基底上，并将颗粒流入连续层。 进一步描述了通过加热抗蚀剂以将固体抗蚀剂转化成小颗粒的气溶胶以形成低粘度液体的装置; 该液体适用于喷射或冲击雾化和气溶胶颗粒尺寸以形成气溶胶。 进一步描述了使用电离气体将电荷赋予气溶胶颗粒并使用充电装置的进展的方法，建立了将带电粒子的流动引导到基底的电场。 充电装置和相关设备的进展导致气溶胶颗粒的高收集效率。

公开(公告)号：EP2766130A4

公开(公告)日：2015-09-16

申请号：EP12840425

申请日：2012-10-12

Applicant: 1366 TECHNOLOGIES INC

Inventor： DANNER GUY M ,  GATES HOLLY G ,  TARASOV VLADIMIR S ,  KANE PETER E ,  MADDEN PETER G ,  SACHS EMANUEL M

IPC: B05D1/06

CPC classification number: B05B5/001 ,  B05B5/005 ,  B05B5/087 ,  B05B7/0012 ,  B05B13/02 ,  B05B15/04 ,  B05D1/04 ,  B05D1/06 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/6715 ,  H01L21/6776

Abstract: The present inventions relate to the formation of a thin polymer film on a substrate. Apparatus is described for transforming a solid polymer resist into an aerosol of small particles, electrostatically charging and depositing the particles onto a substrate, and flowing the particles into a continuous layer. Apparatus is further described for transforming solid resist into an aerosol of small particles by heating the resist to form a low viscosity liquid such as is compatible with nebulization and applying the techniques of jet or impact nebulization and aerosol particle sizing to form the aerosol. A method is further described of using ionized gas to confer charge onto the aerosol particles and using a progression of charging devices establish an electric field directing the flow of charged particles to the substrate. The progression of charging devices and associated apparatus results in high collection efficiency for the aerosol particles.

公开(公告)号：EP2758227A4

公开(公告)日：2015-04-29

申请号：EP12833284

申请日：2012-09-22

Applicant: 1366 TECHNOLOGIES INC

Inventor： SACHS EMANUEL M ,  KANE PETER E ,  GATES HOLLY G ,  HARRIS DAMIEN W ,  POLITO BENJAMIN F ,  INIRIO HECTOR A

IPC: B29C59/02

CPC classification number: B29B13/02 ,  B29C59/02 ,  B29C2059/023 ,  G03F7/0002