公开(公告)号：WO2006066255A3

公开(公告)日：2007-07-12

申请号：PCT/US2005046181

申请日：2005-12-17

Applicant: ADE CORP

Inventor： TIEMEYER TIMOTHY R ,  AKATSU JAMES

IPC: G01B11/30 ,  G01N21/00 ,  G01N21/55

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A method for inspecting a surface of a workpiece comprises scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light and scattered light comprising light that is scattered from the surface upon impingement thereon by the incident beam; and determining an extent of a contribution to surface roughness from a component of the surface, with the component having a surface roughness spatial frequency range.

Abstract translation: 用于检查工件表面的方法包括扫描工件表面上的入射光束以撞击其上以产生反射光和散射光，其包括由入射光束在其上撞击时从表面散射的光; 并且确定从表面的部件对表面粗糙度的贡献的程度，其中该部件具有表面粗糙度空间频率范围。