公开(公告)号：WO0217354A9

公开(公告)日：2003-08-28

申请号：PCT/US0126084

申请日：2001-08-21

Applicant: ADE CORP

Inventor： GAAL CHRISTOPHER ,  SINHA JAYDEEP

IPC: H01L21/66 ,  H01L21/208 ,  H01L21/683 ,  G01N21/01

CPC classification number: H01L21/6838

Abstract: A ring chuck (70) that holds a wafer (8) with a vacuum uses a vacuum trough (80) that contacts the entire outer edge of the wafer (8). The chuck (70) has a base (72) having a top surface (96) equal to or slightly smaller than a wafer (8) to be tested with vacuum channels in the base (72). The base (72) provides the mechanism to connect the chuck to a measurement instrument and a vacuum source. An annulus (74) of non-contaminant material that has a plurality of concentric rings (76) extending upward from its outer edge is fixed to the base top surface (96) with the trough (80) between the concentric rings (76) connected to the vacuum channels (82). The vacuum trough (80) holds the wafer (8) securely to the chuck and minimizes vibrations when the wafer (8) is rotated. When the plurality of concentric rings (76) are contained within the wafer (8) exclusion band, the print through onto the tested are is minimized.

Abstract translation: 用真空保持晶片（8）的环形卡盘（70）使用与晶片（8）的整个外边缘接触的真空槽（80）。 卡盘（70）具有基座（72），其具有等于或略小于要在基座（72）中的真空通道进行测试的晶片（8）的顶表面（96）。 基座（72）提供将卡盘连接到测量仪器和真空源的机构。 具有从其外边缘向上延伸的多个同心环（76）的非污染物质的环（74）被固定到基座顶表面（96）上，在同心环（76）连接的槽（80） 到真空通道（82）。 真空槽（80）将晶片（8）牢固地保持在卡盘上并使晶片（8）旋转时的振动最小化。 当多个同心环（76）被包含在晶片（8）排除带内时，打印到被测试的部分被最小化。

公开(公告)号：WO0217354A3

公开(公告)日：2002-06-06

申请号：PCT/US0126084

申请日：2001-08-21

Applicant: ADE CORP

Inventor： GAAL CHRISTOPHER ,  SINHA JAYDEEP

IPC: H01L21/66 ,  H01L21/208 ,  H01L21/683 ,  G01N21/01

CPC classification number: H01L21/6838

Abstract: A ring chuck (70) that holds a wafer (8) with a vacuum uses a vacuum trough (80) that contacts the entire outer edge of the wafer (8). The chuck (70) has a base (72) having a top surface (96) equal to or slightly smaller than a wafer (8) to be tested with vacuum channels in the base (72). The base (72) provides the mechanism to connect the chuck to a measurement instrument and a vacuum source. An annulus (74) of non-contaminant material that has a plurality of concentric rings (76) extending upward from its outer edge is fixed to the base top surface (96) with the trough (80) between the concentric rings (76) connected to the vacuum channels (82). The vacuum trough (80) holds the wafer (8) securely to the chuck and minimizes vibrations when the wafer (8) is rotated. When the plurality of concentric rings (76) are contained within the wafer (8) exclusion band, the print through onto the tested are is minimized.

Abstract translation: 用真空保持晶片（8）的环形卡盘（70）使用与晶片（8）的整个外边缘接触的真空槽（80）。 卡盘（70）具有基座（72），其具有等于或略小于要在基座（72）中的真空通道进行测试的晶片（8）的顶表面（96）。 基座（72）提供将卡盘连接到测量仪器和真空源的机构。 具有从其外边缘向上延伸的多个同心环（76）的非污染物质的环形区域（74）被固定到基座顶面（96），同心环（76）连接的槽（80） 到真空通道（82）。 真空槽（80）将晶片（8）牢固地保持在卡盘上并使晶片（8）旋转时的振动最小化。 当多个同心环（76）被包含在晶片（8）排除带内时，打印到被测试的部分被最小化。