公开(公告)号：WO2006017160A9

公开(公告)日：2006-11-16

申请号：PCT/US2005024227

申请日：2005-07-08

Applicant: ADE CORP

Inventor： KECK JAY ,  KALLUS DAVID M ,  SMITH BRYAN W ,  VERGOW ZACHARY J

IPC: G01M19/00 ,  G01M99/00

CPC classification number: G06F17/30554 ,  G01N21/9501 ,  G05B19/41875 ,  G05B2219/2602 ,  G06Q10/06 ,  G06Q50/04 ,  H01L21/67005 ,  H01L21/67253 ,  Y02P90/18 ,  Y02P90/22 ,  Y02P90/30

Abstract: A system for searching for patterns of semiconductor wafer features for use in silicon manufacturing and device fabrication processes, the system including: a data acquisition system 00 for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools 10, wafer inspection tools 12, and wafer nanotopography tools 14; a buffer system 02 for providing temporary storage for scan data transmitted and for providing fault tolerance; a server system 04 for providing storage for the scan data transmitted from the buffer system 02 and converting the scan data into a format used by and stored in a database 08 management system; an analysis system 06 client station including a display and communicating with the server system 04, the analysis system 06 and the server system 04 providing scan data structuring and query operations and data transfer operations.

公开(公告)号：WO2006017155A3

公开(公告)日：2006-08-31

申请号：PCT/US2005024209

申请日：2005-07-08

Applicant: ADE CORP

Inventor： KECK JAY ,  KALLUS DAVID M

IPC: G01M99/00 ,  G06F19/00

CPC classification number: G06F17/30554 ,  G01N21/9501 ,  G05B19/41875 ,  G05B2219/2602 ,  G06Q10/06 ,  G06Q50/04 ,  H01L21/67005 ,  H01L21/67253 ,  Y02P90/18 ,  Y02P90/22 ,  Y02P90/30

Abstract: A system for integrating semiconductor wafer data for use in silicon manufacturing and device fabrication processes, the system including: a data acquisition system (00) capable of acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools (10), wafer inspection tools (12), and wafer nanotopography tools (14), a buffer system (02) for providing temporary storage for scan data transmitted and for providing fault tolerance; a server system (04) for providing storage for the scan data transmitted from the buffer system (02) and for converting the scan data into a format used by and stored in a database (08) management system; and an analysis system (06), the analysis system (06) and the server system (04) providing wafer data management, process monitoring, wafer data analysis, and data automation.

Abstract translation: 一种用于集成用于硅制造和器件制造工艺的半导体晶片数据的系统，所述系统包括：能够从不同类型的半导体晶片扫描工具（例如晶片尺寸工具（10））获取扫描数据的数据采集系统（00） 晶片检查工具（12）和晶片纳米成像工具（14），缓冲系统（02），用于为发送的扫描数据提供临时存储并提供容错; 服务器系统（04），用于提供从缓冲系统（02）发送的扫描数据的存储，并将扫描数据转换成数据库（08）管理系统使用和存储的格式; 分析系统（06），分析系统（06）和服务器系统（04），提供晶片数据管理，过程监控，晶片数据分析和数据自动化。

公开(公告)号：WO2006017160A3

公开(公告)日：2007-10-25

申请号：PCT/US2005024227

申请日：2005-07-08

Applicant: ADE CORP

Inventor： KECK JAY ,  KALLUS DAVID M ,  SMITH BRYAN W ,  VERGOW ZACHARY J

IPC: G01M99/00 ,  G06F17/50 ,  G06F15/16 ,  G06F19/00

CPC classification number: G06F17/30554 ,  G01N21/9501 ,  G05B19/41875 ,  G05B2219/2602 ,  G06Q10/06 ,  G06Q50/04 ,  H01L21/67005 ,  H01L21/67253 ,  Y02P90/18 ,  Y02P90/22 ,  Y02P90/30

Abstract: A system for searching for patterns of semiconductor wafer features for use in silicon manufacturing and device fabrication processes, the system including: a data acquisition system 00 for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools 10, wafer inspection tools 12, and wafer nanotopography tools 14; a buffer system 02 for providing temporary storage for scan data transmitted and for providing fault tolerance; a server system 04 for providing storage for the scan data transmitted from the buffer system 02 and converting the scan data into a format used by and stored in a database 08 management system; an analysis system 06 client station including a display and communicating with the server system 04, the analysis system 06 and the server system 04 providing scan data structuring and query operations and data transfer operations.

Abstract translation: 一种用于搜索用于硅制造和器件制造工艺的半导体晶片特征的图案的系统，该系统包括：数据采集系统00，用于从不同类型的半导体晶片扫描工具获取扫描数据，例如晶片尺寸工具10，晶片检查 工具12和晶片纳米成像工具14; 缓冲系统02，用于为发送的扫描数据提供临时存储并提供容错; 服务器系统04，用于提供从缓冲器系统02发送的扫描数据的存储，并将扫描数据转换成数据库08管理系统使用和存储的格式; 分析系统06客户端站，其包括显示器并与服务器系统04，分析系统06和服务器系统04通信，提供扫描数据结构化和查询操作和数据传输操作。

公开(公告)号：WO2006017160A8

公开(公告)日：2006-09-14

申请号：PCT/US2005024227

申请日：2005-07-08

Applicant: ADE CORP

Inventor： KECK JAY ,  KALLUS DAVID M ,  SMITH BRYAN W ,  VERGOW ZACHARY J

IPC: G01M19/00 ,  G01M99/00

CPC classification number: G06F17/30554 ,  G01N21/9501 ,  G05B19/41875 ,  G05B2219/2602 ,  G06Q10/06 ,  G06Q50/04 ,  H01L21/67005 ,  H01L21/67253 ,  Y02P90/18 ,  Y02P90/22 ,  Y02P90/30

Abstract: A system for searching for patterns of semiconductor wafer features for use in silicon manufacturing and device fabrication processes, the system including: a data acquisition system 00 for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools 10, wafer inspection tools 12, and wafer nanotopography tools 14; a buffer system 02 for providing temporary storage for scan data transmitted and for providing fault tolerance; a server system 04 for providing storage for the scan data transmitted from the buffer system 02 and converting the scan data into a format used by and stored in a database 08 management system; an analysis system 06 client station including a display and communicating with the server system 04, the analysis system 06 and the server system 04 providing scan data structuring and query operations and data transfer operations.

Abstract translation: 一种用于搜索用于硅制造和器件制造工艺的半导体晶片特征图案的系统，该系统包括：数据采集系统00，用于采集来自不同类型的半导体晶片扫描工具的扫描数据，例如晶片尺寸工具10，晶片检查 工具12和晶片纳米形貌工具14; 缓冲系统02，用于为传输的扫描数据提供临时存储并提供容错; 服务器系统04，用于为从缓冲系统02传输的扫描数据提供存储，并将扫描数据转换成由数据库08管理系统使用并存储的格式; 包括显示器并与服务器系统04通信的分析系统06客户端站，分析系统06和服务器系统04提供扫描数据结构化和查询操作以及数据传输操作。

公开(公告)号：WO2006017154A2

公开(公告)日：2006-02-16

申请号：PCT/US2005024208

申请日：2005-07-08

Applicant: ADE CORP

Inventor： KECK JAY ,  KALLUS DAVID M ,  CROFT DANIEL P ,  VERGOW ZACHARY J ,  KESLER DANIEL K

IPC: G01M19/00 ,  G01M99/00

CPC classification number: G06F17/30554 ,  G01N21/9501 ,  G05B19/41875 ,  G05B2219/2602 ,  G06Q10/06 ,  G06Q50/04 ,  H01L21/67005 ,  H01L21/67253 ,  Y02P90/18 ,  Y02P90/22 ,  Y02P90/30

Abstract: A system for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data, the system including: a data acquisition system (00) for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools (10), wafer inspection tools (12), and wafer nanotopography tools (14); a buffer system (02) for providing temporary storage for scan data transmitted over a network from the data acquisition system and for providing fault tolerance; a server system (04) for providing storage for the scan data transmitted from the buffer system (02) and converting the scan data into a format used by and stored in a database (08) management system; and an analysis system (06) client station including a display and communicating with the server system (04) over the network, the analysis system (06) and the server system (04) managing the purging, archiving, restoring, importing and exporting of scan data.

Abstract translation: 一种用于半导体晶片数据的集成归档，恢复，清除，导入和导出的系统，该系统包括：用于从不同类型的半导体晶片扫描工具（如晶片尺寸工具）获取扫描数据的数据采集系统（00） ，晶片检查工具（12）和晶片纳米成像工具（14）; 缓冲系统（02），用于为从数据采集系统通过网络发送的扫描数据提供临时存储，并提供容错; 服务器系统（04），用于提供从缓冲系统（02）发送的扫描数据的存储，并将扫描数据转换成数据库（08）管理系统使用并存储的格式; 以及分析系统（06）客户站，其包括显示器并且通过网络与服务器系统（04）通信，分析系统（06）和服务器系统（04）管理清除，归档，恢复，导入和导出 扫描数据。