公开(公告)号：EP3272744A4

公开(公告)日：2018-07-25

申请号：EP15885452

申请日：2015-03-18

Applicant: ADEKA CORP

Inventor： YANAGISAWA SATOSHI ,  TODA HITOMI ,  SHIGENO KOICHI ,  KIMURA MASAKI

IPC: C07D311/16 ,  C08G59/68 ,  G03F7/004

CPC classification number: C07D311/16 ,  C07C309/06 ,  C07C309/30 ,  C08G59/68 ,  C08G59/687 ,  G03F7/004 ,  G03F7/0045

Abstract: Provided are: an aromatic sulfonium salt compound which exhibits low corrosion to a substrate and excellent photolithographic characteristics and is thus useful as a photoacid generator and as a cationic polymerization agent; and a photoacid generator, a resist composition, a cationic polymerization initiator and a cationically polymerizable agent composition, which include the aromatic sulfonium salt compound. The aromatic sulfonium salt compound is represented by the following Formula (I): (wherein, R 1 to R 10 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, a nitro group, a cyano group, an alkyl group having 1 to 18 carbon atoms which is optionally substituted, or the like; R 11 to R 15 each independently represent a hydrogen atom, an alkoxy group having 1 to 18 carbon atoms which is optionally substituted, or the like; at least one of R 11 to R 15 is not a hydrogen atom; and X 1 - represents a monovalent organic sulfonate anion).

公开(公告)号：JP2014094925A

公开(公告)日：2014-05-22

申请号：JP2012248583

申请日：2012-11-12

Applicant: Adeka Corp ,  株式会社Adeka

Inventor： YANAGISAWA TOMOHITO ,  TODA HITOMI ,  SHIGENO KOICHI

IPC: C07D311/16 ,  C09K3/00 ,  G03F7/004

Abstract: PROBLEM TO BE SOLVED: To provide a novel aromatic sulfonium salt that is useful as a photo-acid generator or a cation polymerization initiator, and to provide a resist composition and a cation polymerizable composition using the aromatic sulfonium salt.SOLUTION: An aromatic sulfonium salt compound expressed by general formula (I) is provided. In formula (I), Rto Rrepresent a hydrogen atom or the like; Rto Rrepresent a hydrogen atom or a substituent expressed by -Z-Y, where Z represents an oxygen atom, a sulfur atom or -NR-, and Y and R each independently represent an alkyl group having 1 to 18 carbon atoms which may be substituted with a halogen atom, a hydroxyl group, a nitro group or a cyano group, or the like; and Xrepresents a monovalent anion.

Abstract translation: 要解决的问题：提供可用作光酸产生剂或阳离子聚合引发剂的新型芳族锍盐，并提供使用芳香族锍盐的抗蚀剂组合物和阳离子可聚合组合物。溶液：芳族锍盐 提供了通式（I）表示的化合物。 式（I）中，R表示氢原子等; R-R表示氢原子或由-ZY表示的取代基，其中Z表示氧原子，硫原子或-NR-，Y和R各自独立地表示可以被 卤素原子，羟基，硝基或氰基等; X代表一价阴离子。