公开(公告)号：US20220213592A1

公开(公告)日：2022-07-07

申请号：US17600886

申请日：2020-03-27

Applicant: ADEKA CORPORATION

Inventor： Naoki YAMADA ,  Haruyoshi SATO ,  Kazuki HARANO

IPC: C23C16/18 ,  C07F5/00

Abstract: The present invention provides a thin-film forming raw material including a scandium compound represented by the following general formula (1), a method of producing a thin-film including using the thin-film forming raw material, and a novel scandium compound: where R1 represents an alkyl group having 1 to 4 carbon atoms, R2 represents an alkyl group having 2 or 3 carbon atoms, and R3 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.

公开(公告)号：US20190292663A1

公开(公告)日：2019-09-26

申请号：US16302895

申请日：2017-02-27

Applicant: ADEKA CORPORATION

Inventor： Hiroki SATO ,  Naoki YAMADA ,  Tsubasa SHIRATORI ,  Haruyoshi SATO

IPC: C23C16/455 ,  C23C16/40

Abstract: A raw material for forming a thin film that includes a compound represented by General Formula (1) below. In the formula, R1 represents a linear or branched alkyl group having 2 to 4 carbon atoms; R2 to R5 each independently represent a linear or branched alkyl group having 1 to 4 carbon atoms; A represents an alkanediyl group having 1 to 4 carbon atoms; and M represents titanium, zirconium or hafnium. Provided that when M represents zirconium, A represents an alkanediyl group having 3 or 4 carbon atoms. When M represents titanium or hafnium, it is preferred that A represents an alkanediyl group having 2 or 3 carbon atoms. When M represents zirconium, it is preferred that A represent an alkanediyl group having 3 carbon atoms.