公开(公告)号：US20220213592A1

公开(公告)日：2022-07-07

申请号：US17600886

申请日：2020-03-27

Applicant: ADEKA CORPORATION

Inventor： Naoki YAMADA ,  Haruyoshi SATO ,  Kazuki HARANO

IPC: C23C16/18 ,  C07F5/00

Abstract: The present invention provides a thin-film forming raw material including a scandium compound represented by the following general formula (1), a method of producing a thin-film including using the thin-film forming raw material, and a novel scandium compound: where R1 represents an alkyl group having 1 to 4 carbon atoms, R2 represents an alkyl group having 2 or 3 carbon atoms, and R3 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.