Abstract:
Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.
Abstract:
Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner- based containers adapted for pressure dispensation.
Abstract:
Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.
Abstract:
Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.
Abstract:
Fluid storage and dispensing systems and processes involving various devices, structures and arrangements, as well as techniques and methods, for fluid storage and dispensing, including, without limitation, pre-connect verification couplings that are usefully employed in application to fluid storage and dispensing packages, to ensure proper coupling and avoid fluid contamination issues, empty detect systems that are usefully employed for fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems are described, which achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
Abstract:
Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel (220, 230) is subjected to filling by application of vacuum between the liner (224, 234) and overpack (222, 230). Multiple feed material flow controllers (321A-324A) of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materaisl supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.
Abstract:
A dispensing assembly for a pressure dispense package includes a connector having separate and distinct liquid and extraction conduits, and having a pressurization gas conduit. A liner fitment adapter may include a longitudinal bore to receive a probe portion of a connector defining a liquid extraction conduit, and may include a lateral bore to enable removal of gas. Insertion of a connector into a dispensing assembly simultaneously makes fluidic connections between (a) a gas extraction conduit and a dispensing volume; (b) a liquid extraction conduit and the dispensing volume, and (c) a pressurization gas conduit and a space to be pressurized within a pressure dispense vessel. Presence of fluid or change in phase of flowing fluid within a fluid circuit may be sensed by comparing outputs of first and second temperature sensing elements, with one sensing element including a heater to increase temperature of the sensing element in exposure to gas but not in exposure to liquid. A system and method for fluid dispensing includes a first pressure dispense apparatus and a sensing element arranged to sense a condition correlative of approach to gas saturation of dispensed fluid, and in response to such sensed condition initiates dispensation by a second pressure dispense apparatus for combining pressure dispensed fluid flows supplied to a point of use.
Abstract:
To avoid problems associated with choke-off of a collapsible liner (e.g., disposed within a rigid overpack) during pressure dispensing of fluid therefrom, a pressure dispense package includes a choke prevention element comprising any of a perforated flange within the liner, a channel-defining flange within the liner, a film defining at least one liquid channel along an inner surface of the liner, a radial stiffening element coupled to the liner, an orifice-defining hollow internal support disposed within the liner, one or more magnetic and complementary magnetically responsive elements associated with the liner and surrounding container, or differential collapse characteristics between liner panels. Methods for preventing choke-off of a collapsible liner adapted for pressure dispensing are also provided.
Abstract:
Fluid storage and dispensing systems and processes involving various devices, structures and arrangements, as well as techniques and methods, for fluid storage and dispensing, including, without limitation, pre-connect verification couplings that are usefully employed in application to fluid storage and dispensing packages, to ensure proper coupling and avoid fluid contamination issues, empty detect systems that are usefully employed for fluid storage and dispensing packages incorporating liners that are pressure-compressed in the fluid dispensing operation, ergonomically enhanced structures for facilitating removal of a dispense connector from a capped vessel, cap integrity assurance systems for preventing misuse of vessel caps, and keycoding systems for ensuring coupling of proper dispense assemblies and vessels. Fluid storage and dispensing systems are described, which achieve zero or near-zero headspace character, and prevent or ameliorate solubilization effects in liquid dispensing from liners in overpack vessels.
Abstract:
A material supply system including a container defining an interior volume for holding the material, such container including a dispense opening therein, a dip tube for dispensing the material from the container, and a fitment mounted in the opening of the container. The fitment in one implementation includes at least two port openings therein, through one of which the dip tube extends into the interior volume of the container, and with another of the at least two port openings being adapted for one or more of (i) filling the container, (ii) venting the container, (iii) recirculation of material during dispensing and (iv) flow of a pressurized medium into the interior volume to assist the dispensing. The container can be of a bag-in-drum or a bag-in-can type. A liner with multiple fitments may be employed. The container in another implementation is fabricated with damping structure, e.g., vibrational damping structure, to reduce susceptibility of the container to adverse vibrational and resonant frequency effects.