公开(公告)号：US09362126B2

公开(公告)日：2016-06-07

申请号：US13625400

申请日：2012-09-24

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Ramakrishnan Ganesan ,  Jarrett Dumond ,  M. S. M. Saifullah ,  Su Hui Lim ,  Hazrat Hussain ,  Hong Yee Low

IPC: G03F7/00 ,  H01L21/283 ,  C23C18/04 ,  C23C18/06 ,  C23C18/12 ,  B81C1/00 ,  B82Y40/00 ,  G03F7/004 ,  G03F7/027 ,  B82Y10/00 ,  H01L29/06

CPC classification number: H01L21/283 ,  B81C1/0046 ,  B81C2201/0152 ,  B82Y10/00 ,  B82Y40/00 ,  C23C18/04 ,  C23C18/06 ,  C23C18/1216 ,  G03F7/0002 ,  G03F7/0043 ,  G03F7/027 ,  H01L29/0676

Abstract: There is provided a process for making a patterned metal oxide structure comprising the step of heating an imprint structure comprising a polymerized organometallic compound to remove organic material and thereby form the patterned metal oxide structure, wherein the imprint structure is formed by polymerizing a resist mixture comprising at least one olefinic polymerizable compound and a polymerizable organometallic compound having, e.g., at least one carboxylate of Formula 1: wherein n is 1-12; and each R is independently selected from the group consisting of hydrogen, alkyl, alkenyl, alkynyl, cycloakyl, cycloakenyl, aryl, and aralkyl.

Abstract translation: 提供了一种用于制造图案化金属氧化物结构的方法，其包括加热包含聚合的有机金属化合物的压印结构以除去有机材料并由此形成图案化的金属氧化物结构的步骤，其中通过聚合抗蚀剂混合物形成压印结构，所述抗蚀剂混合物包含 至少一种烯属聚合性化合物和具有例如至少一种式1羧酸酯的可聚合的有机金属化合物：其中n为1-12; 并且每个R独立地选自氢，烷基，烯基，炔基，环烷基，环辛基，芳基和芳烷基。