公开(公告)号：JPH0563303A

公开(公告)日：1993-03-12

申请号：JP25310891

申请日：1991-09-04

Applicant: AGENCY IND SCIENCE TECHN

Inventor： OGURA MUTSURO ,  WATANABE MASANOBU ,  ITO HIDEO ,  MORI MASAHIKO ,  MUKAI SEIJI ,  YAJIMA HIROYOSHI ,  CHIN TOMOO

IPC: H01S5/00

Abstract: PURPOSE:To manufacture the title optical functional element in optical waveguide structure discharging satisfactory optical confining function in simple process on a substrate while reducing the obstruction factor to the increase in the integration degree as well as gaining the freedom of layout. CONSTITUTION:A pair of insulating films 3, 3 in specific width are formed on an n-GaAs substrate 2. Next, an AlGaAs lower side clad layer 6, a GaAs waveguide layer 7 and an AlGaAs upper side clad layer 8 are successively grown by MOCVD step on the substrate main surface exposed by a striped window 4 between the pair of insulating films 3, 3 so As to erect an optical waveguide structure. In such a constitution, if the main surface of the substrate 2 comprises (1, 0, 0) surfaces, the side surfaces of the optical waveguide structure have the oblique surfaces comprising B surfaces (1, 1, 1).