METHOD FOR FORMING FINE PATTERN
    3.
    发明专利

    公开(公告)号:JPH05175176A

    公开(公告)日:1993-07-13

    申请号:JP14671292

    申请日:1992-05-12

    Inventor: KOMIYA YOSHIO

    Abstract: PURPOSE:To provide a more efficient method which can cope with various kinds of processes at the time of directly plotting a pattern on a substrate with an electron beam. CONSTITUTION:A substrate 12 set in a reaction chamber 16 is irradiated with an electron beam 11 containing pattern information. At the same time, the substrate 12 is irradiated with an light energy beam 24a in a direction oblique to the irradiating direction of the electron beam 11 by means of optical means 25, 26, 27, 28, and 29. A substance change takes place only at the part corresponding to the pattern information on the substrate 12 due to the reaction between the beams 11 and 24a.

    SURFACE FIELD EFFECT DEVICE
    4.
    发明专利

    公开(公告)号:JPH02368A

    公开(公告)日:1990-01-05

    申请号:JP11097889

    申请日:1989-04-28

    Inventor: KOMIYA YOSHIO

    Abstract: PURPOSE:To realize a non-linear potential distribution section having complicated construction and still desirable design properties, by providing non-linear potential distribution at least in a part of a gate region in the direction parallel with the surface of a semiconductor region in said part of the gate region. CONSTITUTION:A non-linear potential distribution device is provided at least in a part of a gate region 64, the non-linear potential distribution device consisting of a JJ series array and electrodes M1-M4 capable of providing non-linear potential distribution in the direction parallel with the surface of a semiconductor region in said part of the gate region. In order to apply a voltage to the gate region 64, the first electrode M1 present on the source side and the second electrode M4 on the drain side are used. A voltage applied to the electrode M4 is regulated and it is determined whether zero or certain voltage is made present at a Josephson junction element JJ by a small voltage applied to the electrode M1 when the electrode M4 is at a predetermined voltage. If the electrode M1 is located outside the end of the source, a potential having tendency of increasing gradually from left to right can be regulated freely at the source end point. Accordingly. the channel can be opened or closed as desired.

    PREPARATION OF FINE PATTERN
    5.
    发明专利

    公开(公告)号:JPH05129245A

    公开(公告)日:1993-05-25

    申请号:JP10218992

    申请日:1992-03-27

    Abstract: PURPOSE:To put forward a technique which enables more efficient various processes when a pattern is directly drawn on a substrate using an ion beam. CONSTITUTION:An ion beam 1 with a pattern data is irradiated substantially at right angle to a substrate 3 housed in a reacting chamber 7. At the same time, a light energy beam 13 is irradiated through optical means 14, 15, 16, 17 and 18 to the substrate at an inclination relative to the direction of irradiation of the ion beam. Only areas corresponding to the pattern data are subject to variations of substance resulting from a reaction effect between the ion beam 1 and the light energy beam 13.

Patent Agency Ranking