公开(公告)号：JP2001098372A

公开(公告)日：2001-04-10

申请号：JP27189899

申请日：1999-09-27

Applicant: AGENCY IND SCIENCE TECHN

Inventor： MURAKAMI JUNICHI ,  YOSHIMURA KAZUNORI ,  OI YUTAKA ,  MARUYAMA YUTAKA ,  YAMAGUCHI WATARU

IPC: H01L21/203 ,  B01J19/00 ,  C23C14/46

Abstract: PROBLEM TO BE SOLVED: To provide a nanostructure by a microcluster and a method for making the same. SOLUTION: This method for making the nanostructure consists in making the nanostructure of the single size microcluster by driving the microcluster ions of a metal, semiconductor, etc., of a single size which are formed by an ion beam sputtering method and are narrowed in their translation energy width to