公开(公告)号：JPH10152322A

公开(公告)日：1998-06-09

申请号：JP32604796

申请日：1996-11-20

Applicant: AGENCY IND SCIENCE TECHN

Inventor： MURAKAMI JUNICHI ,  OI YUTAKA ,  YOSHIMURA KAZUNORI ,  IGARASHI KAZUO ,  TANEMURA SAKAE ,  GOTO MASAHIRO

IPC: B01J21/04 ,  B01J32/00 ,  B01J35/10 ,  B01J37/00 ,  C01F7/42 ,  C23C14/00

Abstract: PROBLEM TO BE SOLVED: To provide a method of formation of θ-alumina particles which has large surface areas and is useful as a carrier of metal catalyst, and a catalyst carrier. SOLUTION: This method of formation of θ-alumina particles of 5-200nm diameter comprises spattering metal aluminum powder by electric discharge in argon gas, feeding the aluminum into a gaseous mixture of helium and water to form fine θ-alumina particles by coagulation while controlling the particle size by growing the particles by using metal tubes or reducing particle size by cooling with liquid nitrogen, and depositing the particles on a substrate, thus producing alumina particles of 20nm or less size which has a large surface area and is useful as a carrier of metal catalysts.

公开(公告)号：JP2001098372A

公开(公告)日：2001-04-10

申请号：JP27189899

申请日：1999-09-27

Applicant: AGENCY IND SCIENCE TECHN

Inventor： MURAKAMI JUNICHI ,  YOSHIMURA KAZUNORI ,  OI YUTAKA ,  MARUYAMA YUTAKA ,  YAMAGUCHI WATARU

IPC: H01L21/203 ,  B01J19/00 ,  C23C14/46

Abstract: PROBLEM TO BE SOLVED: To provide a nanostructure by a microcluster and a method for making the same. SOLUTION: This method for making the nanostructure consists in making the nanostructure of the single size microcluster by driving the microcluster ions of a metal, semiconductor, etc., of a single size which are formed by an ion beam sputtering method and are narrowed in their translation energy width to

公开(公告)号：JPH10256528A

公开(公告)日：1998-09-25

申请号：JP7460497

申请日：1997-03-10

Applicant: AGENCY IND SCIENCE TECHN

Inventor： MURAKAMI JUNICHI ,  OI YUTAKA ,  YOSHIMURA KAZUNORI ,  IGARASHI KAZUO ,  TANEMURA SAKAE ,  GOTO MASAHIRO

IPC: B22F9/02 ,  B22F1/02 ,  B22F9/14 ,  C23C14/00 ,  C23C14/35 ,  C30B23/00 ,  H01L21/285 ,  H01L29/06 ,  H01L29/66

Abstract: PROBLEM TO BE SOLVED: To provide a method for generating layer aluminum fine particles and an application to a single electron tunneling quantum device. SOLUTION: Metal aluminum is supplied into mixed gas of helium and steam of 1×10 to 3×10 Torr by sputtering metal aluminum by discharging argon gas, aggregation is generated, then discharged into vacuum to generate single crystal covered on a surface layer with aluminum, thereby forming spherical metal aluminum fine particles (layered aluminum fine particles). The particles are carried on a flow of the helium gas, discharged into vacuum via an aperture, and deposited directly on a board to generate layered aluminum particles of a particle size of 5 to 500nm. The vicinity of an outlet of particle generation source is cooled by the nitrogen or a distance between an aluminum target and the aperture is set to 30 to 50mm, thereby generating the layered aluminum fine particles. Further, single electron tunneling quantum device element using the layered aluminum fine particles obtained by the method is set.